Device and method of assembling head unit, device and method of positioning droplet discharge head,

专利摘要:
PURPOSE: To provide an assembly device and an assembly method of a head unit by which a plurality of droplet discharge heads can be built into a single carriage stably and with high level of accuracy. CONSTITUTION: The assembly device and method are provided with a recognition means 215 to recognize positions of the carriage 2 and each droplet discharge head 3 as images, a moving means 211 to move the carriage 2, a correction means 212 to slightly move a head holding member 4, a fixing means 213 to fix each head holding member 4 to the carriage, and a control means 215. The control means 215 locates each droplet discharge head 3 against the carriage 2 after fixing the location of the carriage 2 based on the result of recognition by the recognition means 214 and furthermore, fixes each head holding member 4 to the carriage 2.
公开号:KR20030032849A
申请号:KR1020020061970
申请日:2002-10-11
公开日:2003-04-26
发明作者:나카무라신이치；야마다요시아키
申请人:세이코 엡슨 가부시키가이샤；
IPC主号:

专利说明:

Assembling device and assembly method of head unit, positioning device and positioning method of liquid drop ejection head, fixing device and fixing method of liquid drop ejection head, and manufacturing method of liquid crystal display device, manufacturing method of organic EL device, electron emission Method of manufacturing apparatus, method of manufacturing PD apparatus, method of manufacturing electrophoretic display device, method of manufacturing color filter, method of manufacturing organic EL, spacer forming method, metal wiring forming method, lens forming method, resist forming method and light diffusion DEVICE AND METHOD OF ASSEMBLING HEAD UNIT, DEVICE AND METHOD OF POSITIONING DROPLET DISCHARGE HEAD, DEVICE AND METHOD OF FIXING THE SAME, METHOD OF PRODUCING LCD, METHOD OF PRODUCING ORGANIC EL AND ORGANIC EL DEVICE, METHODECT OF PRODUCION , METHOD OF PRODUCING PDP, METHOD OF PRODUCING ELECTROPHORESIS DISPLAY, METHOD OF PRODUCING COLOR FILTER, SPACER FORMING METHOD, METAL WIRING FO RMING METHOD, LENS FORMING METHOD, RESIST FORMING METHOD, AND PHOTO DIFFUSER FORMING METHOD}
[183] The present invention provides an assembly and assembly method of a head unit for assembling a plurality of liquid drop ejection heads represented by inkjet heads into a single carriage, a positioning device and a positioning method of a liquid drop ejection head, a fixing device of a liquid drop ejection head, and A fixing method, a manufacturing method of a liquid crystal display device using the head unit, a manufacturing method of an organic EL device, a manufacturing method of an electron emitting device, a manufacturing method of a PDP device, a manufacturing method of an electrophoretic display device, a manufacturing method of a color filter, A method for producing an organic EL, a method for forming a spacer, a method for forming a metal wiring, a method for forming a lens, a method for forming a resist, and a method for forming a light diffuser.
[184] In a conventional printer or the like, when a plurality of liquid drop ejection heads are required, each liquid drop ejection head is held in the head holding member, and the liquid drop ejection heads are mounted on a single carriage to mount the plurality of liquid drop ejection heads. It was handled as a head unit together with the holding member and the carriage.
[185] And when a liquid drop ejection head is comprised in a head holding member, positioning and screwing are performed with a microscope etc. personally. In the case where the head holding member with the head is formed in the carriage, a pin or the like for positioning the head holding member is provided in the carriage so that the head holding member is set and fixed thereto.
[186] By the way, since such a liquid droplet discharge head can selectively discharge minute liquid droplets from the nozzle row with good precision, it is applicable to manufacture of color filters, such as a liquid crystal display device or an organic electroluminescence display, and various Application to manufacturing apparatuses, such as an electronic device or an optical device, is also anticipated.
[187] In consideration of such an application technique, high precision is required for the positional accuracy (assembly precision) of the nozzle (nozzle row) in the plane or the positional accuracy of the carriage as its premise, together with the performance of the liquid drop ejection head itself. In addition, depending on the liquid to be discharged, the life of the liquid drop ejection head is shortened, and it is necessary to consider frequent replacement of the liquid drop ejection head.
[188] In this regard, in the conventional liquid drop ejection head (head unit) mounted in the printer, since the accumulation of precision of each part determines the overall precision, there is naturally a limit in maintaining high positioning accuracy stably. In addition, in the assembly by hand, work is complicated and there is a risk of inferior reliability.
[189] The present invention provides an assembly and assembly method of a head unit capable of assembling a plurality of liquid drop ejection heads stably and with good precision, a positioning device and a positioning method of a liquid drop ejection head, and a fixing device of a liquid drop ejection head. And a fixing method, and a manufacturing method of a liquid crystal display device using the head unit, a manufacturing method of an organic EL device, a manufacturing method of an electron emitting device, a manufacturing method of a PDP device, a manufacturing method of an electrophoretic display device, and a manufacturing method of a color filter. Another object of the present invention is to provide a method for producing an organic EL, a spacer forming method, a metal wiring forming method, a lens forming method, a resist forming method, and a light diffusion forming method.
[1] 1 is a plan view of a head unit according to an embodiment.
[2] 2 is a front view of the head unit according to the embodiment;
[3] 3 is a side view of the head unit according to the embodiment;
[4] 4 is a structural diagram of a reference pin of an embodiment;
[5] 5 is a cross-sectional view around the liquid drop ejection head of the embodiment;
[6] 6 is a perspective view schematically showing the liquid drop ejection head according to the embodiment;
[7] 7 is an enlarged cross-sectional view of the liquid drop ejection head of the embodiment;
[8] 8 is a structural diagram of a head holding member of the embodiment;
[9] 9 is an enlarged perspective view illustrating a method for assembling a head unit using the assembling jig according to the embodiment.
[10] 10 is a structural diagram of an assembly jig of an embodiment.
[11] The top view which shows the assembly method of the head unit using the assembly jig of embodiment.
[12] The front view which shows the assembly method of the head unit using the assembly jig of embodiment.
[13] The schematic diagram of the drawing apparatus of embodiment.
[14] The perspective view of the main carriage in the drawing apparatus of embodiment.
[15] The top view of the main carriage in the drawing apparatus of embodiment.
[16] 16 is an explanatory diagram showing a method for setting a head unit.
[17] The schematic diagram of the wiping apparatus in the drawing apparatus of embodiment.
[18] 18 is a structural diagram of a master plate in the alignment mask of the embodiment;
[19] 19 is a plan view of the alignment mask of the embodiment;
[20] 20 is a front view of the alignment mask of the embodiment;
[21] The whole perspective view seen from the front side of the assembling apparatus of embodiment.
[22] The whole perspective view seen from the back side of the assembling apparatus of embodiment.
[23] The whole top view of the assembling apparatus of embodiment.
[24] 24 is an overall front view of the assembling apparatus of the embodiment.
[25] The whole side view seen from the left side of the assembling apparatus of embodiment.
[26] The perspective view of the periphery of the X * Y table in the unit moving apparatus of embodiment.
[27] 27 is a structural diagram of a set table in the unit moving device of the embodiment;
[28] The top view of the (theta) table in the unit moving apparatus of embodiment.
[29] 29 is a cutaway side view of the θ table in the unit moving device of the embodiment;
[30] The front view of the (theta) table in the unit moving apparatus of embodiment.
[31] 31 is a plan view of an X-Y table circumference in the unit moving device of the embodiment;
[32] The front view of the periphery of the X * Y table in the unit moving apparatus of embodiment.
[33] The perspective view of the periphery of the correction X * Y table in the head correction apparatus of embodiment.
[34] 34 is a plan view of a periphery of a correction XY table in the head correction device of the embodiment;
[35] 35 is a front view of the periphery of the correction XY table in the head correction device of the embodiment;
[36] 36 is a side view of a periphery of a correction X / Y table in the head correction device of the embodiment;
[37] 37 is a perspective view of an arm unit in the head correction device of the embodiment;
[38] The front view of the arm unit in the head correction apparatus of embodiment.
[39] 39 is a side view of the arm unit in the head correction device of the embodiment;
[40] 40 is a cross-sectional view of the engagement arm of the arm unit.
[41] 41 is a perspective view of the recognition device of the embodiment;
[42] 42 is a plan view of the recognition device of the embodiment;
[43] 43 is a front view of the recognition device of the embodiment;
[44] 44 is a side view of the recognition device of the embodiment;
[45] 45 is an overall perspective view of a temporary fixing device of the embodiment;
[46] 46 is a plan view of a temporary fixing device of the embodiment;
[47] 47 is a front view of the temporary fixing device of the embodiment;
[48] 48 is a side view of the temporary fixing device of the embodiment;
[49] 49 is a perspective view of an adhesive application device.
[50] 50 is a block diagram of a control device according to an embodiment.
[51] Fig. 51 is a partially enlarged view of a color filter manufactured by the method for manufacturing a color filter of the embodiment.
[52] 52 is a cross sectional view of the production step, schematically showing the method of manufacturing the color filter of the embodiment.
[53] 53 is a cross-sectional view of a liquid crystal display device manufactured by a method of manufacturing a color filter of an embodiment.
[54] 54 is a circuit diagram of a display device manufactured by a method for manufacturing an organic EL of an embodiment.
[55] 55 is an enlarged plan view showing a planar structure of a pixel region of a display device;
[56] Fig. 56 is a cross sectional view of the manufacturing step (1), which schematically shows a method for manufacturing the organic EL of the first embodiment.
[57] Fig. 57 is a sectional view of the manufacturing step (2), which schematically illustrates a method for manufacturing the organic EL of the first embodiment.
[58] Fig. 58 is a sectional view of the manufacturing step (3), which schematically illustrates a method for manufacturing the organic EL of the first embodiment.
[59] 59 is a cross-sectional view schematically showing the method for manufacturing an organic EL according to a modification of the first embodiment.
[60] 60 is a plan view and a sectional view schematically illustrating the method of manufacturing the organic EL of the second embodiment.
[61] Fig. 61 is a sectional view schematically illustrating the method of manufacturing the organic EL of the third embodiment.
[62] Fig. 62 is a sectional view schematically illustrating the method of manufacturing the organic EL of the fourth embodiment.
[63] Fig. 63 is a sectional view schematically illustrating the method of manufacturing the organic EL of the fifth embodiment.
[64] 64 is a cross-sectional view schematically illustrating the method of manufacturing the organic EL according to the sixth embodiment.
[65] Fig. 65 is a sectional view schematically illustrating the method of manufacturing the organic EL of the eighth embodiment.
[66] 66 is a cross-sectional view schematically showing the method for manufacturing an organic EL according to a modification of the eighth embodiment.
[67] 67 is a schematic diagram illustrating a recognition operation of a carriage in the drawing device of the embodiment.
[68] * Explanation of symbols for main parts of the drawings
[69] A: assembly device
[70] B: drawing device
[71] C: assembly jig
[72] D: alignment mask
[73] 1: head unit
[74] 2: carriage
[75] 3: liquid drop discharge head
[76] 4: head holding member
[77] 11: body plate
[78] 12: reference pin
[79] 13: support member
[80] 14: handle
[81] 15: pipe connection assembly
[82] 16: wiring connection assembly
[83] 17 pipe connection member
[84] 25: pin body
[85] 26: reference mark (small hole)
[86] 29a: tip section
[87] 32: handle body
[88] 34: Daekyung Department
[89] 45: liquid inlet
[90] 48: pump part
[91] 48a: discharge side cross section
[92] 49: nozzle forming plate
[93] 50: head body
[94] 52: nozzle formation surface
[95] 53: nozzle column
[96] 57: discharge nozzle
[97] 57a: discharge nozzle (outermost)
[98] 61: end
[99] 62: resin
[100] 65: nozzle reference mark
[101] 76: coupling hole
[102] 77: adhesive injection hole
[103] 78: bonding site
[104] 81: jig body
[105] 82: mounting pin
[106] 84: vertical edge
[107] 85: horizontal edge
[108] 86: positioning unit
[109] 101: head moving part
[110] 105: unit introduction
[111] 106: temporary deployment table
[112] 106a: temporary placement angle
[113] 108: wiping device
[114] 113: Y table
[115] 116: X table
[116] 121: base plate
[117] 123: Stopper Plate
[118] 124: square opening
[119] 131: Wiping Sheet
[120] 132 wiping unit
[121] 133: moving mechanism
[122] 137: Wiping Roller
[123] 139: cleaning liquid supply head
[124] 161: master plate
[125] 161a: mark forming surface
[126] 162: Plate Holder
[127] 164: head reference mark
[128] 165: carriage reference mark
[129] 171: support pin
[130] 211 unit moving device
[131] 212 head correction device
[132] 213: temporary fixing device
[133] 214: recognition device
[134] 215: control unit
[135] 231: set table
[136] 232: θ table
[137] 233: X and Y tables
[138] 271: X axis table
[139] 272 Y axis table
[140] 302: X and Y tables for correction
[141] 303: correction table
[142] 304: arm unit
[143] 331: Combined Arm
[144] 333 arm lifting device
[145] 343: engagement pin
[146] 344: Pin Holder
[147] 345: coil spring
[148] 347 taper portion
[149] 352 camera position adjustment unit
[150] 353: Recognition Camera
[151] 359: micro stage
[152] 373: air table
[153] 374: adhesive application device
[154] 377: Y air table
[155] 378: Sub Y Air Table
[156] 380 Z-axis air table
[157] 384 dispenser unit
[158] 387: Glue Injection Nozzle
[159] 402: input unit
[160] 403: drive unit
[161] 404: detector
[162] 405: control unit
[163] 411: CPU
[164] 412: ROM
[165] 413: RAM
[166] 414: P-CON
[167] 416: Timer
[168] 500: color filter
[169] 511: substrate
[170] 512 pixel (filter element)
[171] 513 barrier
[172] 514: light shielding layer
[173] 515: white floor
[174] 516: ink layer
[175] 521: colored layer
[176] 522: overcoat layer
[177] 523: electrode layer
[178] 611: display device (organic EL)
[179] 621: display substrate
[180] 641 light emitting element (hole injection layer)
[181] 642: pixel electrode
[182] 652: reflective electrode
[190] The assembling apparatus of the head unit of the present invention faces a head unit in which a plurality of liquid drop ejection heads, each of which is held in the head holding member, is temporarily mounted on a single carriage via the head holding member, and each liquid drop ejection head is placed on the carriage. An assembly apparatus of a head unit to be fixed in a positioned state, comprising: recognition means for image recognition of the position of the carriage and the position of each liquid drop ejecting head, and the carriage being moved in the X, Y, and θ directions while maintaining the carriage Coupling means coupled to the head holding member, for finely moving the head holding member in the X, Y, and θ directions, fixing means for fixing the head holding member to the carriage, recognition means, moving means, and correcting means. And control means for controlling the fixing means, wherein the control means drives the moving means based on the recognition result of the recognition means to move the carriage. After the determination, the correction means is driven to position each liquid drop ejection head with respect to the carriage via each head holding member, and the fixing means is driven to fix the liquid drop ejection head to the carriage through each head holding member. do.
[191] According to this configuration, first, the position of the carriage is image-recognized by the recognition means, and the moving means is driven to position the carriage based on the recognition result. As a result, since each liquid drop ejection head temporarily mounted on the carriage is in a temporary positioning state, unnecessary movement of the recognition means and the correction means facing each liquid drop ejection head can be minimized. Subsequently, the liquid drop ejection head mounted on each head holding member is recognized by the recognition means, and the correction means is driven based on the recognition result to position each liquid drop ejecting head with respect to the carriage through each head holding member. do. As a result, since each liquid drop ejection head is accurately positioned, the fixing means is driven here to fix each head holding member to the carriage.
[192] Thus, a series of operations from position recognition of the carriage and each liquid drop ejection head to positioning (position correction) of the carriage and each liquid drop ejection head and fixing each liquid drop ejection head to the carriage are carried out in a single device. In this case, the head unit comprising a plurality of liquid drop ejection heads in the carriage with high positioning accuracy can be stably obtained.
[193] As the liquid drop ejection head, a method of applying a voltage to the piezoelectric element and discharging the liquid drop using the deformation thereof, or instantaneously heating the liquid drop by a heater and using the evaporation (volume expansion) to remove the liquid drop. Although there are methods of discharging, any of these may be used.
[194] In this case, an alignment mask is formed in which the position of the carriage and the position of each liquid drop ejecting head mounted on the carriage are formed in a pattern, and the control means are respectively obtained from the alignment mask held in the moving means and the head unit obtained by the recognition means. It is preferable to control the moving means, the correction means and the fixing means based on the data and the unit position data.
[195] According to this structure, an alignment mask can be made circular and a head unit can be obtained as a duplication. Therefore, a plurality (or a plurality) of head units assembled as duplicates have the same precision mutually, and can stably mass-produce the head units having high assembly precision.
[196] In this case, the recognition of the position of the carriage is performed by the recognition means for recognizing each of the two reference marks separated from each other and installed in the carriage, and the recognition means is one of the X-axis direction and the Y-axis direction for the carriage. It is desirable to have a recognition camera that accommodates two reference marks, respectively, in the field of view by the relative movement of.
[197] According to this configuration, since the recognition camera of the recognition means receives the two reference marks within the field of view by relative movement in one of the X-axis direction and the Y-axis direction with respect to the carriage, Precision errors can be ruled out as much as possible.
[198] In such a case, the position recognition of each liquid drop ejection head is performed by the recognition means respectively recognizing two separated nozzles in the nozzle row formed on the nozzle formation surface of the liquid drop ejection head, and the recognition means is two nozzles. It is desirable to have two recognition cameras that simultaneously accommodate each of the two in the field of view.
[199] According to this configuration, the two recognition cameras of the recognition means allow each of the two nozzles to be simultaneously accommodated in the field of view, so that the two nozzles can be simultaneously imaged without moving the recognition camera. Precision error due to movement can be reliably eliminated. In addition, since the two nozzles separated from each other in the nozzle row are image-recognized, the position recognition in the X-axis direction and the Y-axis direction of the liquid drop ejection head as well as the inclination angle (θ-axis direction) can be accurately recognized. . In addition, it is preferable to make two nozzles separated in the nozzle row into the outermost two nozzle in a nozzle row.
[200] In this case, the liquid drop ejection head is temporarily mounted so as to be suspended from the carriage through the head holding member with the nozzle-forming face upward, and the moving means includes the X Y Y θ axis movement table and the X Y Y θ axis. It is preferable to have the set member which is fixed on the (theta) axis | movement table of a movement table, and which maintains a carriage in a liquid droplet discharge head up state.
[201] According to this structure, the carriage moves suitably by the X-Y * (theta) -axis movement table in the state which temporarily mounted the liquid droplet discharge head upward. Thereby, when the recognition means is fixed, the carriage and each liquid drop ejection head can be appropriately moved so as to face the recognition means. In addition, the carriage position correction can be appropriately performed based on the recognition result of the recognition means. Moreover, the level adjustment of the nozzle formation surface can be performed by a set member.
[202] In such a case, the head holding member is formed with two engaging holes arranged at the same time as the correction means are engaged with each other, and the correction means includes the θ of the X Y Y θ axis shift table and the X Y Y θ axis shift table. It is preferable to have a Z-axis movement table attached to an axial movement table, and a pair of engagement arm attached to a Z-axis movement table, and couple | bonded with two engagement holes of a head holding member.
[203] According to this configuration, since the correction means has an X, Y, θ axis movement table, it is possible to appropriately correct the position of each liquid drop ejection head based on the position recognition by the correction means. Further, by coupling a pair of engagement arms attached to the Z-axis movement table of the X-Y-θ axis movement table to the two engagement holes of the head holding member, each head holding member (each liquid drop ejecting head) is corrected for correction. It can be moved stably with good precision.
[204] In this case, the fixing means preferably has an adhesive applying mechanism for applying an adhesive between the head holding member and the carriage, and a moving table for moving the adhesive applying mechanism in the X, Y, and Z axis directions.
[205] According to this configuration, the fixing means has an adhesive applying mechanism for applying an adhesive between the head holding member and the carriage, and the fixing of the head holding member to the carriage is performed by bonding, so that unlike the fixing by screws, the fixing means is fixed. The displacement of the head holding member in the work (fixed operation) can be effectively prevented. Moreover, since it has a moving table which moves an adhesive agent application mechanism to a X * Y * (theta) axis direction, an adhesive agent can be apply | coated freely in arbitrary positions. Moreover, as an adhesive agent, it is preferable to use what is called an instant adhesive agent. Moreover, after sticking a head holding member (temporary fixation), it is more preferable to fix this mechanically again (this fixation).
[206] Another head unit assembling apparatus of the present invention is a head unit assembling apparatus which faces a head unit in which a plurality of liquid drop ejection heads are temporarily mounted in a single carriage, and fixes each liquid drop ejection head in a state in which the liquid drop ejection heads are positioned in the carriage. Recognizing means for image recognition of the position of the carriage and the position of each liquid drop ejecting head, the moving means for holding the carriage and moving it in the X, Y and θ directions, and the liquid drop ejecting head, Correction means for minutely moving the droplet ejection head in the X, Y and θ axis directions, fixing means for fixing the liquid droplet ejection head to the carriage, and control means for controlling the recognition means, the movement means, the correction means and the fixing means. The control means drives the moving means based on the recognition result of the recognition means to position the carriage, and then drives the correction means to carry the carry. Positioning the respective liquid drop ejection heads with respect to the paper, and fixing the positioned liquid drop ejection heads to the carriage by driving the fixing means.
[207] This configuration constitutes each liquid drop ejection head directly on the carriage. According to this, first, the position of the carriage is image-recognized by the recognition means, and the moving means is driven to position the carriage based on the recognition result. . Subsequently, each liquid drop ejection head is position-recognized by the recognition means, and the correction means is driven based on the recognition result to position each liquid drop ejection head relative to the carriage. As a result, since each liquid drop ejection head is accurately positioned, the fixing means is driven here to fix each liquid drop ejection head to the carriage.
[208] Thus, a series of operations from position recognition of the carriage and each liquid drop ejection head to positioning (position correction) of the carriage and each liquid drop ejection head and fixing each liquid drop ejection head to the carriage are carried out in a single device. In this case, the head unit comprising a plurality of liquid drop ejection heads in the carriage with high positioning accuracy can be stably obtained.
[209] In the assembling method of the head unit of the present invention, a plurality of liquid drop ejection heads each held by the head retaining member face the head unit temporarily mounted on a single carriage via the head retaining member, and each liquid drop ejection head is placed on the carriage. A method of assembling a head unit fixed in a positioned state, comprising: a carriage recognition step of image recognition of a carriage position, a carriage positioning step of positioning a carriage based on a recognition result in the carriage recognition step, and discharge of each liquid drop A head recognition step of image recognition of the position of the head, a head positioning step of positioning each liquid drop ejection head with respect to the carriage via each head holding member based on the recognition result in the head recognition step, and each of the positioned heads And a fixing step of fixing the holding member to the carriage.
[210] According to this configuration, a series of operations from the position recognition of the carriage and each liquid drop ejection head to positioning (position correction) of the carriage and each liquid drop ejection head and fixing to the carriage of each liquid drop ejection head are performed in a single operation. Since it is performed by the apparatus, the head unit which comprised the some liquid droplet discharge head in the carriage with high positioning precision can be obtained stably.
[211] In this case, it is preferable to repeat the head recognition process, the head positioning process, and the fixing process by the number of liquid drop ejection heads in this process order.
[212] According to this configuration, since the head recognition step, the head positioning step, and the fixing step are successively performed for each liquid drop discharge head, the movement of each liquid drop discharge head can be stopped at a minimum distance and the fixed step Can be performed efficiently.
[213] In this case, the fixing step is preferably performed by adhering the head holding member to the carriage with an adhesive, and after the fixing step, it is preferable to further include the present fixing step for mechanically fixing the head holding member to the carriage.
[214] According to this configuration, the head holding member is temporarily fixed to the carriage by the adhesive agent. Therefore, not only this temporary fixing but also the displacement of the head holding member (liquid drop discharge head) in this fixing can be prevented effectively. Further, even when the carriage is moved out of the device between the temporary fixing and the main fixing, displacement of the head holding member due to vibration or the like can be prevented. On the other hand, the fixed head holding member does not displace or leave the carriage even if the adhesive deteriorates over time.
[215] In this case, an alignment mask in which the position of the carriage and the position of each liquid drop ejecting head mounted on the carriage is patterned is prepared, and the carriage positioning process and the head positioning process are respectively performed from the alignment mask and the head unit under the same conditions. It is preferable to execute on the basis of the obtained master position data and unit position data, respectively.
[216] According to this structure, an alignment mask can be made circular and a head unit can be obtained as a duplication. Therefore, a plurality (or a plurality) of head units assembled as duplicates have the same precision mutually, and can stably mass-produce the head units having high assembly precision.
[217] Another method for assembling the head unit of the present invention is an assembly method of a head unit which faces a head unit in which a plurality of liquid drop ejection heads are temporarily mounted in a single carriage, and fixes each liquid drop ejection head in a state in which the liquid drop ejection heads are positioned on the carriage. A carriage recognition step of image recognition of the position of the carriage, a carriage positioning step of positioning the carriage based on the recognition result in the carriage recognition step, a head recognition step of image recognition of the position of each liquid drop ejection head, A head positioning step of positioning each liquid drop ejection head relative to the carriage based on the recognition result in the head recognition step, and a fixing step of fixing each positioned liquid drop ejection head to the carriage.
[218] According to this structure, since a series of operations from the position recognition of a carriage and each liquid droplet discharge head to the fixation of each liquid droplet discharge head to a carriage are performed by a single apparatus, a plurality of liquid droplet discharge heads are carried in a carriage. The head unit constituted with high positioning accuracy can be stably obtained.
[219] The positioning device of the liquid drop ejection head of the present invention carries the liquid drop ejection head temporarily mounted on the carriage via the head holding member prior to fixing the liquid drop ejection head held by the head holding member to the carriage on which it is mounted. A positioning device of a liquid drop ejection head for positioning at a position, comprising: recognition means for image recognition of a position of a liquid drop ejection head, coupled to a head holding member, and the head holding member being relatively minute in the X, Y, &thetas; A correction means for moving, and a control means for controlling the recognition means and the correction means, wherein the control means drives the correction means based on the recognition result of the recognition means to position the liquid drop ejection head with respect to the carriage through the head holding member. It is characterized by determining.
[220] According to this configuration, the liquid drop ejection head is temporarily mounted on a carriage set in advance at a predetermined position via the head holding member. From this state, the liquid drop ejection head is positioned and recognized by the recognition means, and based on the recognition result. The correction means is then driven to position the liquid drop ejection head relative to the carriage. In this case, since the correction means has a structure in which the head holding member is relatively moved in the X, Y and θ axis directions, the position correction of the liquid drop ejection head can be quickly performed with good accuracy.
[221] In this case, an alignment mask having a patterned position of the liquid drop ejection head relative to the carriage is provided, and the control means is corrected based on the master position data obtained from the alignment mask through the recognition means and the head position data obtained from the liquid drop ejection head. It is desirable to control the means.
[222] According to this structure, since the alignment mask is made into the circular shape of positioning and the liquid drop ejection head can be positioned in a carriage in the form of the duplication, the liquid drop ejection head can always be positioned with stable positioning accuracy. Therefore, the reliability of the device can be improved.
[223] In this case, the position recognition of the liquid drop ejection head is performed by the recognition means respectively recognizing two separated nozzles in the nozzle row formed on the nozzle formation surface of the liquid drop ejection head, and the recognition means is performed by the two nozzles. It is desirable to have two recognition cameras, each of which simultaneously accommodates in the field of view.
[224] According to this configuration, since the position recognition of the liquid drop ejection head is performed by image recognition of two separated nozzles in the nozzle row of the liquid drop ejection head, the position of the nozzle row in the X-axis direction and the Y-axis direction is Of course, the angle of inclination (the θ axis direction) can also be recognized with good accuracy. In addition, since the two recognition cameras allow each of the two nozzles to be simultaneously accommodated in the field of view, the two nozzles can be image-recognized without moving the recognition camera, thereby eliminating the accuracy error caused by the movement of the recognition camera. can do. Moreover, it is preferable to make two nozzles separated in the nozzle row into the outermost two nozzle in a nozzle row.
[225] In this case, it is preferable that the recognition means has an inter-view adjustment mechanism capable of adjusting the mutual inter-view dimensions of the two recognition cameras.
[226] According to this structure, when the length of nozzle row differs in the liquid droplet discharge head used as a recognition object, the inter-view dimension of two recognition cameras can be adjusted by this inter-viewing adjustment mechanism. As a result, the two recognition cameras can always accommodate two nozzles simultaneously in the field of view.
[227] In such a case, the head holding member is provided with two engaging holes arranged at the same time as the correction means are coupled to each other, and the correction means includes the X.Y.θ-axis movement table and the X.Y.θ-axis movement table. It is preferable to have a Z-axis movement table attached to the (theta) -axis movement table, and a pair of engagement arm attached to the Z-axis movement table, and couple | bonded with two engagement holes of a head holding member.
[228] According to this configuration, since the correction means has an X, Y, θ axis movement table, the position correction of the liquid drop ejection head can be reliably performed by a series of movement operations through the head holding member. Moreover, since a pair of engagement arms of a Z-axis movement table are engaged with two engagement holes of a head holding member, and position correction is performed, position correction can be performed stably with good precision.
[229] In this case, it is preferable that the X-axis movement table and the Y-axis movement table of the X-Y-theta-axis movement table each have a linear motor constituting a drive source and an air slider for guiding the movement.
[230] According to this structure, since a high moving precision can be obtained compared with the case where the main body of a moving system is performed with a ball screw, position correction of a liquid drop ejection head can be performed with a high precision in apparatus structure.
[231] In this case, each coupling arm has a coupling pin in which the leading end is inserted into each coupling hole, and the leading end of the coupling pin is formed in a tapered shape with the tip side having a diameter smaller than the coupling hole and the proximal side having a diameter larger than the coupling hole. It is desirable to have.
[232] According to this structure, each engagement hole of a head holding member and the engagement pin of each engagement arm in a Z-axis movement stage can be bonded with high precision. That is, the clearance between the engagement hole and the engagement pin can be prevented from affecting the accuracy at the time of position correction.
[233] In this case, each coupling arm preferably further has a pin holder for holding the coupling pin in the axial direction thereof and a spring for pressing the coupling pin in the protruding direction.
[234] According to this configuration, the coupling pin coupled to the coupling hole presses the head holding member through the coupling hole, so that the position of the head holding member at the time of position correction and after the position correction can be stabilized. In addition, when fixing a head holding member to a carriage after position correction, this can be fixed in a positionally stable state.
[235] In this case, it is preferable that the two engaging holes of the head holding member are formed in a circular shape on one side and elliptical in the other.
[236] According to this structure, even if there is a manufacturing error in the separation dimension of a pair of coupling arm (coupling pin), the coupling with respect to each coupling hole of each coupling pin can be reliably and smoothly performed. That is, binding error in the coupling arm can be reliably prevented.
[237] Another liquid drop ejection head positioning device of the present invention is a liquid drop ejection head for positioning a liquid drop ejection head temporarily mounted on a carriage prior to fixing the drop ejection head to a carriage on which it is mounted. A determination device, comprising: recognition means for image recognition of a position of a liquid drop ejection head, correction means for coupling the liquid drop ejection head to a relatively small movement of the liquid drop ejection head in the X.Y.θ axis direction, and a recognition means. And control means for controlling the correction means, wherein the control means drives the correction means based on the recognition result of the recognition means to position the liquid drop ejection head with respect to the carriage.
[238] In this configuration, the liquid drop ejection head is positioned directly on the carriage. According to this configuration, the liquid drop ejection head is positioned by the recognition means, and the correction means is driven based on the recognition result to eject the liquid drop onto the carriage. Position the head directly. In this case, since the correction means has a structure in which the liquid drop ejection head is relatively moved in the X.Y.θ axis direction, the position correction of the liquid drop ejection head can be quickly performed with good accuracy.
[239] The assembling apparatus of another head unit of the present invention includes the above-described positioning device of the liquid drop ejecting head of the present invention.
[240] According to this configuration, the liquid drop ejection head can be positioned in the carriage with good accuracy through the head holding member. Therefore, the head unit which comprised the liquid droplet discharge head in the carriage with good precision can be obtained stably.
[241] The method for positioning the liquid drop ejection head of the present invention includes a liquid drop ejection head temporarily mounted on the carriage via the head retaining member prior to fixing the liquid drop ejection head mounted on the head retaining member to the carriage on which it is mounted. A liquid drop ejection head positioning method for positioning a liquid drop ejection head, comprising: a head recognition step of image recognition of a position of a liquid drop ejection head, and a liquid drop ejection through a head holding member to a carriage based on a recognition result in the head recognition step. And a head positioning step of positioning the head.
[242] According to this configuration, since the liquid drop ejection head is position-recognized and the liquid drop ejection head is positioned on the carriage via the head holding member based on the recognition result, the liquid drop ejection head is directly positioned on the carriage. You can decide. Therefore, the positioning (position correction) of the liquid drop ejection head can be performed quickly with good accuracy.
[243] In this case, the alignment mask which pattern-formed the position of the liquid drop ejection head mounted in the carriage is prepared, The head positioning process is the master position data and head position data obtained from the alignment mask and the liquid drop discharge head, respectively, on the same conditions. It is preferable to carry out on the basis of
[244] According to this structure, since the alignment mask is made into the circular shape of positioning and the liquid drop ejection head can be positioned in a carriage in the form of the duplication, the liquid drop ejection head can always be positioned with stable positioning accuracy.
[245] According to another method of positioning the liquid drop ejection head of the present invention, the position of the liquid drop ejection head for positioning the liquid drop ejection head temporarily mounted in the carriage prior to fixing the liquid drop ejection head to the carriage on which it is mounted. A determination method includes a head recognition step of image recognition of a position of a liquid drop ejection head, and a head positioning step of positioning a liquid drop ejection head relative to a carriage based on a recognition result in the head recognition step. do.
[246] According to this configuration, since the liquid drop ejection head is position-recognized and the liquid drop ejection head is positioned on the carriage based on the recognition result, the liquid drop ejection head can be positioned directly on the carriage. Therefore, the positioning (position correction) of the liquid drop ejection head can be performed quickly with good accuracy.
[247] The fixing device of the liquid drop ejecting head of the present invention is a fixing device of a liquid drop ejecting head for fixing a liquid drop ejecting head mounted on a head holding member in a positioning state to a carriage on which the liquid drop ejecting head is mounted, the carriage holding means for holding a carriage. And head holding means for holding the liquid drop ejection head in a positioning state with respect to the carriage via the head holding member, and adhesive injection means for injecting an adhesive between the head holding member and the carriage in this state. .
[248] According to this structure, with respect to the carriage held by the carriage holding means, the head holding means holds the liquid drop ejecting head in the positioning state via the head holding member. In this state, the adhesive injection means injects the adhesive between the head holding member and the carriage. In this case, the adhesive solidifies, and the head holding member is adhesively fixed to the carriage in a positioning state. That is, unlike the screw fixing or the like, the liquid drop ejection head can be stably fixed to the carriage via the head holding member without applying an external force. In addition, in consideration of the shortening of the solidification time, it is preferable to use a so-called instant adhesive as the adhesive. In addition, it is more preferable to mechanically fix the liquid drop ejecting head (head holding member) to the carriage (main fixing) after the adhesion fixing.
[249] In this case, the head holding means preferably serves as positioning means for positioning the liquid drop ejecting head on the carriage via the head holding member.
[250] According to this configuration, the positioning operation of the liquid drop ejection head relative to the carriage and the subsequent fixing operation can be performed continuously, and the working efficiency can be improved and the high assembly precision of the liquid drop ejection head can be reliably maintained. have.
[251] In this case, the head holding means is configured with a timer, and the head holding means preferably maintains the liquid drop ejecting head in a positioning state at the time when the adhesive reaches a predetermined adhesive strength after the injection of the adhesive.
[252] According to this configuration, since the liquid drop ejection head is held in a positioning state with respect to the carriage until the head holding means is brought into a perfect bonding state, it is possible to reliably prevent the adhesion failure or the displacement of the liquid drop ejection head. Can be.
[253] In this case, the adhesive injection means preferably has an adhesive injection mechanism for injecting adhesive between the head holding member and the carriage, and a moving table for moving the adhesive injection mechanism in the X, Y, and Z axis directions.
[254] According to this configuration, since the adhesive injection mechanism for injecting the adhesive can be properly moved in the X, Y, and Z axis directions through the moving table, the adhesive is held around the liquid drop discharge head held in the positioning state by the head holding means. The injection device can be freed.
[255] In this case, the X-axis movement table, the Y-axis movement table, and the Z-axis movement table of the movement table are preferably each composed of an air cylinder.
[256] According to this structure, a moving table can be comprised at low cost, and an adhesive injection mechanism can be moved quickly through a moving table. Moreover, it becomes possible to drive an adhesive injection mechanism using this pneumatic pressure gauge.
[257] In this case, a pair of adhesive injection holes are formed in the contact portion with the carriage of the head holding member by sandwiching the nozzle forming surface of the liquid drop ejection head, and the adhesive injection mechanism corresponds to the pair of adhesive injection holes. It is preferable to have a pair of adhesive injection nozzles.
[258] According to this configuration, by inserting a pair of adhesive injection nozzles of the adhesive injection mechanism into the pair of adhesive injection holes of the head holding member and injecting the adhesive, the head holding member and the carriage sandwiching the nozzle forming surface of the liquid drop ejecting head and The adhesive can be spread evenly over the two contact portions of. As a result, the adhesive can be injected simply and quickly at an appropriate position.
[259] In this case, the pair of adhesive injection holes of the head holding member are formed in two sets with a slight distance in the X-axis direction or the Y-axis direction, and correspondingly, the X-axis moving table or the Y-axis moving table of the moving table is the adhesive injection mechanism. It is preferable to have a sub table which reciprocates by a spaced dimension.
[260] According to this structure, since the pair of adhesive injection holes of the head holding member are formed two sets apart slightly in the X-axis direction or the Y-axis direction, even if the contact part is wide, the adhesive can be reliably spread evenly. In addition, since the X-axis moving table or the Y-axis moving table of the moving table has a subtable for reciprocating the adhesive injection mechanism by a spaced apart dimension, this exclusive subtable allows the adhesive injection between two sets of adhesive injection holes. The movement of the instrument can be performed reliably and quickly.
[261] In this case, it is preferable that the end of the carriage side of each adhesive injection hole beveled.
[262] According to this configuration, the capillary phenomenon at the contact portion between the head holding member to which the adhesive is injected and the carriage is promoted by the beveling portion of the adhesive injection hole, so that the adhesive can be reliably and smoothly supplied to the contact portion. .
[263] In this case, it is preferable that each adhesive injection nozzle is inclined with respect to the Z axis | shaft, and each adhesive injection hole is formed with the hole long in diagonal direction.
[264] According to this configuration, it is possible to effectively prevent the adhesive injection nozzle facing the adhesive injection hole of the head holding member from interfering with the head holding means holding the liquid drop ejecting head in the positioning state. In addition, since the adhesive injection nozzle is inserted obliquely into the adhesive injection hole, the adhesive can be injected toward the edge portion of the adhesive injection hole, and the adhesive can be reliably evenly supplied to the contact portion.
[265] Another liquid drop ejection head fixing device of the present invention is a liquid drop ejection head fixing device for fixing a liquid drop ejection head to a carriage on which it is mounted, the carriage holding means for holding a carriage and a liquid drop ejection. And a head holding means for holding the head in a positioning state with respect to the carriage, and an adhesive injection means for injecting an adhesive between the liquid drop ejecting head and the carriage in this state.
[266] This configuration fixes the liquid drop ejection head directly to the carriage, whereby the head retaining means maintains the liquid drop ejection head in the positioning state with respect to the carriage held by the carriage retaining means, In this state, the adhesive injection means injects the adhesive between the head holding member and the carriage. In this way, by coagulating the adhesive, the liquid drop ejection head is directly adhered and fixed to the carriage in a positioning state. That is, unlike the screw fixing or the like, the liquid drop ejection head can be fixed to the carriage without applying an external force. Also in this case, in consideration of the shortening of the solidification time, it is preferable to use a so-called instant adhesive as the adhesive. In addition, it is more preferable to mechanically fix the liquid drop ejecting head (head holding member) to the carriage (main fixing) after the adhesion fixing.
[267] Another assembling apparatus of the head unit of the present invention includes the above-described fixing device for the liquid drop ejection head of the present invention.
[268] According to this configuration, for example, when a plurality of liquid drop ejection heads are mounted on the carriage, the positioned liquid drop ejection heads can be efficiently fixed to the carriage, and the head unit assembled with good precision. Can be obtained stably.
[269] The method for fixing a liquid drop ejection head of the present invention is a method for fixing a liquid drop ejection head in which a liquid drop ejection head mounted on a head retaining member is fixed to a carriage on which it is mounted, in a positioning state. A head holding step of holding the discharge head in a positioning state with respect to the carriage, and an adhesive injection step of injecting an adhesive between the head holding member and the carriage in this state are characterized by the above-mentioned.
[270] According to this configuration, the head holding member is adhesively fixed to the carriage in a positioning state by solidifying the adhesive. That is, unlike the screw fixing or the like, the liquid drop ejection head can be fixed to the carriage via the head holding member without applying an external force. Thus, the displacement of the liquid drop ejection head in the fixing operation can be effectively prevented.
[271] Another method for fixing a liquid drop ejection head of the present invention is a method for fixing a liquid drop ejection head in which a liquid drop ejection head is fixed to a carriage on which it is mounted, the liquid drop ejection head being positioned relative to the carriage. And an adhesive injection step of injecting an adhesive between the liquid drop ejecting head and the carriage in this state.
[272] According to this structure, by solidifying an adhesive agent, the liquid droplet discharge head can be directly adhere | attached and fixed to a carriage in the positioning state, and the displacement of the liquid droplet discharge head in a fixing operation can be prevented effectively.
[273] The manufacturing method of the liquid crystal display device of this invention is a manufacturing method of the liquid crystal display device which forms many filter elements on the board | substrate of a color filter using the head unit assembled by the above-mentioned head unit assembly apparatus of this invention. Introducing various filter materials into the plurality of liquid drop ejection heads, scanning the plurality of liquid drop ejection heads relative to the substrate through the head unit, and selectively discharging the filter material to form a plurality of filter elements. It features.
[274] The manufacturing method of the organic electroluminescent apparatus of this invention uses the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and manufactures the organic electroluminescent apparatus which forms an EL light emitting layer in many pixel pixels on a board | substrate, respectively. As a method, various light emitting materials are introduced into a plurality of liquid drop ejection heads, a plurality of liquid drop ejection heads are scanned relatively to a substrate through a head unit, and the light emitting material is selectively ejected to form a plurality of EL light emitting layers. Characterized in that.
[275] The manufacturing method of the electron emission apparatus of this invention is a manufacturing method of the electron emission apparatus which forms many fluorescent substance on an electrode using the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, A some liquid The fluorescent material of various colors is introduced into the droplet ejection head, a plurality of liquid droplet ejection heads are relatively scanned with respect to the electrode through the head unit, and the fluorescent material is selectively ejected to form a plurality of phosphors.
[276] The manufacturing method of the PDP apparatus of this invention is a manufacturing method of the PDP apparatus which uses a head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and forms fluorescent substance in each of many recessed parts on a back substrate. Introducing a plurality of fluorescent materials into the plurality of liquid drop ejection heads, scanning the plurality of liquid drop ejection heads relative to the rear substrate through the head unit, and selectively ejecting the fluorescent material to form a plurality of phosphors; It features.
[277] The manufacturing method of the electrophoretic display apparatus of this invention uses the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and uses the electrophoretic display apparatus which forms a electrophoretic body in many recessed parts on an electrode. As a manufacturing method, a plurality of liquid droplet materials are introduced into a plurality of liquid drop ejection heads, a plurality of liquid drop ejection heads are relatively scanned with respect to an electrode through a head unit, and a plurality of the liquid bodies are selectively ejected by selectively ejecting the fluid material. It is characterized by forming a sieve.
[278] As described above, the head unit is manufactured using a method of manufacturing a liquid crystal display device, a method of manufacturing an organic EL (Electronic Luminescence) device, a method of manufacturing an electron emission device, a method of manufacturing a plasma display panel (PDP) device, and an electrophoretic display device. By applying to the method, it is possible to selectively supply an appropriate amount of filter material, luminescent material, and the like required for each device at an appropriate position. In addition, the dedicated liquid drop discharge head can be supplied quickly through the head unit. In addition, the scan of the liquid drop ejection head is generally made of a main scan and a sub scan, but only a sub scan when the so-called one line is composed of a single liquid drop ejection head. In addition, the electron emission device is a concept including a so-called field emission display (FED) device.
[279] The manufacturing method of the color filter of this invention uses the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and manufactures the color filter which manufactures the color filter which arrange | positioned many filter elements on a board | substrate. A filter material is introduced into a plurality of liquid drop ejection heads, the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the filter material is selectively ejected to form a plurality of filter elements. It is characterized by.
[280] In this case, the plurality of filter elements are accommodated in the recesses formed by the convex banks (also called partition walls) provided on the substrate, and before the filter elements are formed, the bank material is introduced into the plurality of liquid drop discharge heads. Preferably, the plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the bank material is selectively ejected to form a bank.
[281] In this case, an overcoat film covering a plurality of filter elements and banks is formed, and after forming the filter element, a translucent coating material is introduced into the plurality of liquid drop ejection heads, and the plurality of liquid drop ejections are performed through the head unit. It is preferable to form the overcoat film by scanning the head relative to the substrate and selectively discharging the coating material.
[282] The manufacturing method of the organic EL of this invention uses the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and the manufacturing method of the organic EL formed by arrange | positioning the several pixel pixel containing an EL light emitting layer on a board | substrate. As a plurality of liquid drop ejection heads, various light emitting materials are introduced, the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the light emitting materials are selectively ejected to form a plurality of EL light emitting layers. It is characterized by.
[283] In this case, a plurality of EL light emitting layers are accommodated in recesses formed by convex banks (also called partition walls) provided on the substrate, and before forming the EL light emitting layer, bank materials are introduced into the plurality of liquid drop ejection heads. Preferably, the plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the bank material is selectively ejected to form a bank.
[284] In this case, a plurality of pixel electrodes are formed between the plurality of EL light emitting layers and the substrate in correspondence with the EL light emitting layer, and a liquid electrode material is introduced into the plurality of liquid drop discharge heads before forming the bank. Preferably, the plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the liquid electrode material is selectively ejected to form a plurality of pixel electrodes.
[285] In this case, the counter electrode is formed so as to cover the plurality of EL light emitting layers and the banks, and after forming the EL light emitting layer, a liquid electrode material is introduced into the plurality of liquid drop ejection heads, and a plurality of liquid drops are provided through the head unit. It is preferable to form the counter electrode by scanning the discharge head relative to the substrate and selectively discharging the liquid electrode material.
[286] The spacer formation method of this invention uses the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, and forms the spacer of many particle shape so that a micro cell gap may be comprised between two board | substrates. As a forming method, a particle material constituting a spacer is introduced into a plurality of liquid drop ejection heads, a plurality of liquid drop ejection heads are scanned relatively to a substrate through a head unit, and the particulate material is selectively ejected to at least one substrate. It is characterized by forming a spacer thereon.
[287] The metal wiring formation method of this invention is a metal wiring formation method which forms a metal wiring on a board | substrate using the head unit assembled by the above-mentioned head unit assembly apparatus of this invention, It is liquid state in a some liquid droplet discharge head. A metal material is introduced, the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the liquid metal material is selectively discharged to form metal wirings.
[288] The lens forming method of the present invention is a lens forming method of forming a plurality of microlenses on a substrate using a head unit assembled by the above-described head unit assembling apparatus of the present invention. The material is introduced, the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the lens material is selectively ejected to form a plurality of micro lenses.
[289] The resist formation method of this invention is a resist formation method which forms the resist of arbitrary shape on a board | substrate using the head unit assembled by the above-mentioned head unit assembly apparatus of this invention. The material is introduced, the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the resist material is selectively ejected to form a resist.
[290] The light diffusing body forming method of the present invention is a light diffusing body forming method for forming a plurality of light diffusing bodies on a substrate using a head unit assembled by the above-described head unit assembling apparatus of the present invention. A light diffusing material is introduced into the drop ejecting head, the plurality of liquid drop ejecting heads are scanned relatively to the substrate through the head unit, and the light diffusing material is selectively discharged to form a plurality of light diffusing bodies. .
[291] Thus, each electronic device or the above-mentioned head unit is applied to the manufacturing method of a color filter, the manufacturing method of an organic EL, the spacer formation method, the metal wiring formation method, the lens formation method, the resist formation method, and the light-diffuser formation method. A suitable amount of filter material or light emitting material required for each optical device can be selectively supplied to an appropriate position. In addition, the dedicated liquid drop discharge head can be supplied quickly through the head unit. In addition, said "bank" is a concept including the partition, rib, etc. which have a side wall of protrusion shape regardless of side surface shape (inclined surface or a vertical surface). That is, "bank" means the part which is relatively convex seen from the board | substrate.
[292] EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to an accompanying drawing. Since the ink jet head (liquid drop ejection head) of an ink jet printer can eject minute ink droplets (liquid drop) in a dot shape with good precision, it is a special ink or photosensitive property as a liquid drop (eject object liquid), for example. By using resin etc., application to the manufacturing field of various components is anticipated. In addition, in such an application technique, it is assumed that a great influence on the durability of a liquid drop ejection head, such as a highly viscous ejection liquid, is to be provided, so that a head unit having a plurality of liquid drop ejection heads configured to a carriage with good accuracy can be supplied from time to time. It is necessary to do.
[293] The assembling apparatus of the head unit of this embodiment is attached to the manufacturing apparatus of a color filter (henceforth "drawing apparatus") comprised in flat displays, such as a liquid crystal display device, for example, and attaches a head unit to this at any time. To be able to supply. In this drawing apparatus, the filter element of a color filter is equipped with the some liquid droplet discharge head which discharges R, G, B filter material as a liquid droplet, and the assembly apparatus of a head unit carries out this several liquid droplet discharge head. The head unit is assembled to the carriage with good precision so that it can be supplied to the drawing device appropriately.
[294] In this case, the assembling procedure of the head unit is as follows. First, each liquid drop ejection head is separately assembled to the head holding member in a positioning state, and it is temporarily mounted on a single carriage, and then each liquid drop ejection head is positioned relative to the carriage. After the decision, the temporary fixation and the last seen fixation. The assembly of the liquid drop ejection head to the head holding member, the temporary mounting to the carriage and the present fixation are performed by an external process by hand, while positioning the plurality of liquid drop ejection heads on the carriage and temporarily fixing them. The work to be performed is carried out in the assembling apparatus of the embodiment.
[295] Therefore, in this embodiment, first, the head unit handled by this assembly apparatus, the liquid droplet discharge head, the head holding member, and the carriage which are its components are demonstrated. In addition, before and after this description, the relationship between the head unit and said drawing apparatus, the assembly method with respect to the head holding member of the liquid drop ejecting head using a jig, and the alignment mask used as a positioning reference of a head unit are demonstrated. . After that, the assembling apparatus of the head unit will be described in detail. And finally, the example which applied this head unit to the manufacturing method of what is called a flat display is demonstrated.
[296] 1, 2 and 3 are structural diagrams of the head unit. As shown in the figure, the head unit 1 includes a carriage 2, a plurality of (12) liquid drop discharge heads 3 mounted on the carriage 2, and each liquid drop discharge head 3; A plurality of twelve head retaining members 4 for attaching to the carriage 2 separately are provided. The twelve liquid drop ejection heads 3 are divided into six parts from side to side and arranged at an inclined angle with respect to the main scanning direction. In addition, each of the six liquid drop ejection heads 3 are disposed to be displaced from each other with respect to the sub-scan direction, and the total ejection nozzles 57 (to be described later) of the 12 liquid drop ejection heads 3 are continuous in the sub-scan direction. (Some redundancy). That is, in the head arrangement of the embodiment, the six liquid drop ejection heads 3 arranged inclined in the same direction on the carriage 2 are arranged in two rows, and the liquid drop ejection heads 3 are arranged between each head row. It is arranged to rotate 180 °. In addition, this arrangement pattern is an example, For example, the adjacent liquid droplet discharge heads 3 in each head row are arrange | positioned at an angle of 90 degrees (adjacent heads are "H" shaped), or each head It is possible to arrange | position the liquid droplet discharge head 3 between rows at an angle of 90 degrees (heads between rows have a "H" shape). In any case, the dots by the entire discharge nozzles 57 of the twelve liquid drop discharge heads 3 are preferably continuous in the sub-scanning direction. In addition, when making the liquid drop ejection head 3 into a dedicated component with respect to various board | substrates, it is not necessary to set the liquid drop ejection head 3 inclined, and just arrange | position in a zigzag shape or staircase shape. In addition, as long as the nozzle row (dot row) of predetermined length can be comprised, this may be comprised by the single liquid drop discharge head 3, and may be comprised by the some liquid drop discharge head 3, too. That is, the number or columns of the liquid drop ejection heads 3 and the arrangement pattern are arbitrary.
[297] The carriage 2 includes a substantially rectangular body plate 11 with a part notched, a pair of left and right reference pins 12 and 12 provided at an intermediate position in the long side direction of the body plate 11, and a main body. A pair of left and right support members 13 and 13 attached to both long side portions of the plate 11 and a pair of left and right handles 14 and 14 provided at the end of each support member 13 are included. The left and right handles 14 and 14 serve as sites for holding the head unit 1, for example, when the assembled head unit 1 is disposed in the drawing device B. In addition, the support members 13 and 13 on either side become a site | part at the time of fixing the carriage 2 to the set part of the assembly apparatus A or the drawing apparatus B (all are mentioned later in detail).
[298] In addition, the carriage 2 has a pair of left and right pairs of piping connection assemblies 15 and 15 and a pair of left and right, which are located above the two-part liquid drop ejection head group 3S and are connected to these liquid drop discharge heads 3. The wiring connection assemblies 16 and 16 are provided. Each piping connection assembly 15 is pipe-connected to the filter material supply system of the drawing apparatus B, and similarly, each wiring connection assembly 16 is wire-connected to the control system of the drawing apparatus B. As shown in FIG. 1 is shown abbreviate | omitted the piping connection assembly 15 of one side (left side).
[299] The main body plate 11 is made of a thick plate such as stainless steel, and a pair of mounting openings 18 and 18 for attaching each of the six liquid drop ejecting heads 3 to the left and right are formed, and at the appropriate position. A plurality of discharge openings 19 for reducing the weight are formed in the chamber. Each mounting opening 18 is a series of opening portions 18a for attaching six liquid drop ejection heads 3, and an arrangement of six liquid drop ejection heads (liquid drop ejection head group 3S) 3 As a result, the axis is slightly inclined with respect to the axis of the main body plate 11.
[300] Each support member 13 is made of a thick stainless plate or the like, and two fixing holes (clearance holes) 21 and 21 and two bolt holes 22 and 22 for fixing the same are formed, and these fixing holes The pin hole 23 into which the positioning pin is inserted is formed between the 21 and 21 and the bolt holes 22 and 22. Although details will be described later, when the head unit 1 is set in the assembling apparatus A, the pin unit 23 is positioned and screwed using two fixing holes 21 and 21, and similarly. When the head unit 1 is set in the drawing device B, it is positioned using the pin hole 23 and screwed using two bolt holes 22 and 22.
[301] The pair of right and left reference pins 12 and 12 serve as a reference for positioning (position recognition) the carriage 2 in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition. 11) It is attached to protrude on the back side. As shown in FIG. 4, each of the reference pins 12 has a cylindrical pin body 25 and a concave shape formed in the central portion of the tip end surface of the pin body 25, specifically, a hole-shaped reference mark 26. Consists of The pin body 25 protrudes at the tip of the base part press part 27 for press-fitting the carriage 2, the body part 28 connected to the base press part 27, and the body part 28. It consists of the formed mark formation part 29, and the reference mark 26 is formed in the front end surface 29a of this mark formation part 29. As shown in FIG.
[302] The tip end surface 29a of the mark formation part 29 is mirror-processed, and the small hole used as the reference mark 26 is drilled in the center position of this tip end surface 29a. The small hole (reference mark) 26 is, for example, about 0.3 mm in diameter, and communicates with the shaft core hole 30 formed in the shaft center portion from the base indentation portion 27 to the body portion 28. have. In this case, the reference pin 12 is formed by boring the small hole 26, followed by heat treatment (ion nitriding) and mirror-finishing the front end surface 29a of the mark forming portion 29. As an example of mirror finish, lapping which grind | polishes through fine grinding | polishing particles between a grinding | polishing tool and the front end surface 29a is not limited to this.
[303] In this way, since the front end surface 29a is white and the reference mark 26 of the small hole can be imaged by the recognition camera in the dark color, the alignment accuracy of the carriage 2 can be improved. In addition, although the reference pin 12 demonstrated the cross section in the column shape, it may be elliptical or polygonal. The reference mark 26 of the small hole is not limited to the small hole, but may be a concave shape having a groove such that sufficient contrast can be obtained, and the concave planar shape is not limited to the circle.
[304] Although details will be described later, the recognition camera 353 mounted on the assembling device A and the drawing device B captures the front end surface 29a of the reference pin 12 on which the reference mark 26 is formed within the field of view. Image recognition (pattern recognition) is performed. Therefore, in the pattern recognition by the recognition camera 353, the front end surface 29a of mirror finish is bright color, and the concave reference mark 26 formed in the substantially center part of the front end surface 29a is dark. Recognized as (暗色), the reference mark 26 is image recognized with sufficient contrast. Therefore, the reference mark 26 can be recognized with good precision, and recognition error can be reliably prevented.
[305] The reference pin 12 formed in this way is press-fitted so that the front end surface 29a may be made downward, and to be driven in the attachment hole part formed in the carriage (main body plate 11) 2. The reference pin 12 pressed into the carriage 2 projects from the rear surface of the body plate 11 so as to be approximately the same height as the liquid drop ejecting head 3 protruding from the carriage 2. That is, the front end surface 29a serving as the image recognition surface of the reference pin 12 and the nozzle forming surface 52 (see FIG. 3) serving as the image recognition surface of the liquid drop ejecting head 3 are located in substantially the same plane. It is.
[306] Thereby, when detecting the ejection nozzle 57 of each liquid droplet ejection head 3 following the two reference pins 12 and 12 by the recognition camera 353, the focal position is changed (a recognition camera ( 353), it is possible to effectively prevent the recognition camera 353 from interfering with other components in the relative movement of the recognition camera 353 for image recognition. In addition, although the pair of reference pins 12 and 12 are preferable to be provided in the substantially intermediate position of the long side direction of the main body plate 11, they may be provided in another position as long as they are mutually separated.
[307] As shown in Figs. 1, 2 and 3, the left and right handles 14 and 14 are intended to have a heavy head unit 1 (about 7 kg), and each handle 14 is a handle portion. It is formed in the "L" shape by the handle main body 32 used and the arm part 33 extended at right angles from the lower end of the handle main body 32. The upper end of the handle main body 32 is a large diameter portion 34 for preventing slipping. In addition, an anti-slip knurling process is performed on the outer peripheral surface of the handle main body 32. In addition, in this embodiment, although the knurling process of a double cut is employ | adopted (refer FIG. 2 and FIG. 3), a single cut can also be employ | adopted.
[308] The arm part 33 extends horizontally, and is screwed so that the arm part may seat on the support member 13 of the carriage 2 at the front-end | tip part. That is, each handle 14 is detachably attached to the carriage 2. In this way, the left and right handles 14 and 14 are raised so as to protrude from a position protruding from the end of the carriage (body plate 11) 2 in the long side direction, that is, a position away from the liquid drop discharge head 3. It is installed.
[309] Therefore, when the handles (14, 14) are gripped and the carriage (head unit 1) 2 is lifted, the carriage 2 is lifted up while maintaining a substantially horizontal posture by the balance of the forces. do. In addition, in the conveyance work or the like, the hand holding the handle 14 does not cause trouble such as touching the liquid drop discharge head 3. In addition, although the detail is mentioned later, this handle 14 becomes especially useful for carrying out the head unit 1, as well as setting work with respect to the drawing apparatus B of the head unit 1 (it mentions later for details).
[310] Each piping connection assembly 15 is arrange | positioned above each liquid droplet discharge head group 3S, and a pair of spacers 36 and 36 provided in the both ends of the longitudinal direction of the main body plate 11, and a pair of It consists of the press plate 37 which spans between the spacers 36 and 36, and the six sets of piping adapters 38 mounted in the press plate 37. As shown in FIG. The six sets of pipe adapters 38 are fixed to the pressing plates 37 so as to project the head-side connection portions at the lower ends thereof slightly.
[311] Although details will be described later, the liquid drop discharge head 3 is a so-called double row, and the six sets of pipe adapters 38 are connected to the liquid drop discharge head 3 through the two pipe connection members 17, respectively. Connected. That is, the pipe connecting member 17 is connected to each liquid drop ejecting head 3 in a coupled manner, and the pressing plate 37 on which the six sets of pipe adapters 38 are mounted is fixed to both spacers 36 and 36. Thereby, the six sets of piping adapters 38 are connected to the liquid droplet discharge head 3 via the piping connection member 17, respectively. And when it sets in the drawing apparatus B, the inflow side of each piping adapter 38 is pipe-connected to the filter material supply system by one touch (it mentions later for details).
[312] Similarly, each wiring connection assembly 16 includes three bent support members 40, 40, and 40 provided at the left and right ends of the carriage 2, a connector base 41 fixed to the upper end of the bent support member 40, and And four head relay boards 42 having wiring connectors 43 attached to the connector base 41. The four head relay boards 42 are connected to the two head boards 47 of each of the liquid drop ejecting heads 3 described later via a flexible flat cable (not shown). The head relay boards 42 are wired and connected by the wiring plugs of the control system cables when they are set in the drawing device B (the details will be described later).
[313] As shown only in FIG. 2, the head unit 1 is further provided with a relay board cover 24 covering both wiring connection assemblies 16. The relay board cover 24 includes a pair of side covers 24a covering a straight portion from the side surfaces of each wiring connection assembly 16 and an upper surface cover 24b between the pair of side covers 24a. The upper surface cover 24b of these is attached after setting the head unit 1 to the drawing apparatus B. As shown in FIG. In addition, although it mentions in detail later, in the step of setting the head unit 1 to the assembly apparatus A, unlike the case of setting to the drawing apparatus B, not only the relay board cover 24 but both assemblies 15 and 16, as well. ) Is not assembled.
[314] Next, the liquid droplet discharge head 3 is demonstrated using FIG. The liquid drop ejection head 3 is a so-called double row, and has a liquid introduction section 45 having two connection needles 46, a double head substrate 47 leading to the side of the liquid introduction section 45, and a liquid introduction section. 45 is provided with two pump parts 48 extended downward and the nozzle formation plate 49 connected with the pump part 48. As shown in FIG. Said piping connection member 17 is connected to the liquid introduction part 45, and said flexible flat cable is connected to the head board 47. On the other hand, by the pump part 48 and the nozzle formation plate 49, the square head main body 50 which protrudes to the back side of the carriage 2 is comprised. In addition, two rows of nozzle rows 53 and 53 are formed on the nozzle formation surface 52 of the nozzle formation plate 49 (see FIG. 6).
[315] As shown in FIG. 6 and FIG. 7, the pump portion 48 has a pressure chamber 55 and a piezoelectric element 56 corresponding to the number of nozzles, and each pressure chamber 55 is connected to the corresponding discharge nozzle 57. Communicating. In addition, the base side of the pump portion 48, that is, the base side of the head body 50 is formed in a rectangular flange shape to accommodate the liquid introduction portion 45, and the flange portion 58 has a liquid drop discharge head 3. Pair of screw holes (female threads) 59 and 59 for the small screws for fixing the screws to the head holding member 4 are formed. The pair of screw holes 59 and 59 are located at both long side portions and are arranged to be point symmetrical with respect to the center of the nozzle formation surface 52. Although details will be described later, the liquid drop ejecting head 3 is fixed to the head holding member 4 by two small screws 73 and 73 which are screwed into the flange portion 58 through the head holding member 4. (See FIG. 9).
[316] The nozzle formation plate 49 is formed with the stainless plate etc., and is adhere | attached on the discharge side end surface (liquid droplet discharge surface) of the pump part 48. As shown in FIG. More specifically, as shown schematically in Figs. 6 and 7A, the pump portion 48 includes a nozzle portion plate through the mechanism portion 48a in which the piezoelectric element 56 is accommodated, and the resin film 48b. Together with 49, it has a silicon cavity 48c joined to this mechanism portion 48a. That is, the nozzle formation plate 49 is bonded to the silicon cavity 48c, and in this state is joined to the joining surface 48d of the mechanism part 48a via the resin film 48b, and the said pressure chamber 55 is closed. It consists. Therefore, considering the assembly method in the head main body 50, the said resin film 48b, the silicon cavity 48c, and the nozzle formation plate (including the plating layer 49a mentioned later) 49 are a pump part. The pressure chamber assembly 60 is comprised with respect to the mechanism part 48a of 48. As shown in FIG. And the joining surface 48d of the mechanism part 48a is formed in the rectangle, while the pressure chamber assembly 60 containing the nozzle formation plate 49 is formed in the similar shape slightly smaller than this, and the pressure The seal assembly 60 is overlapped and joined so that it may become substantially concentric with the bonding surface 48d.
[317] Therefore, between the periphery of the pressure chamber assembly 60 and the edge part of the joining surface 48d of the mechanism part 48a, the edge part 61 as clearance for joining is comprised over the periphery, and this end ( 61 is molded in the resin 62. That is, the edge part 61 which consists of the edge (edge part) of the bonding surface 48d and the end surface (side surface part) of the pressure chamber assembly 60 is molded by resin 62 so that this may be filled. Therefore, the lower end of the head main body 50 is a form in which the perimeter was beveled by this resin 62.
[318] Although details are mentioned later, the mold by this resin 62 prevents the head main body 50 from being used as the wiping sheet 131 at the time of wiping. In this case, the liquid drop ejecting head 3 is held in the carriage 2 inclined slightly in the horizontal plane, but the wiping sheet 131 is wiped from the X-axis direction with respect to the head body 50 (Fig. 17). Reference). Therefore, the resin 62 of the mold over the above circumference may be provided only at least on the long side portion or at both long side portions before starting the wiping. The same applies to the beveling process described later. In addition, as shown in FIG. 7B, a protector function of molding the resin 62 so as to slightly protrude forward from the nozzle forming plate 49 (t dimension shown) and protecting the discharge nozzle 57 on the resin 62. It is also possible to give. In addition, as shown in FIG. 7C, the joint surface 48d of the mechanism portion 48a and the pressure chamber assembly 60 have the same shape, and instead of the mold of the resin 62, the edge of the pressure chamber assembly 60 is removed. Beveling may also be used.
[319] On the other hand, in the nozzle formation plate 49, two nozzle rows 53 and 53 are arranged in parallel with each other, and each nozzle row 53 is formed of 180 pieces (typically shown in the figure) arranged at the same pitch. The discharge nozzle 57 is comprised. That is, two nozzle rows 53 and 53 are arranged symmetrically on the nozzle formation surface 52 of the head main body 50 with the center line interposed between them. And the nozzle port 63 of each discharge nozzle 57 is opened inside the circular recessed part 64 which formed the water repellent (liquid repellent) plating layer 49a.
[320] In addition, the code | symbol 65, 65 in FIG. 6 is two nozzle reference marks for the position recognition of the liquid droplet discharge head 3. As shown in FIG. As described later, in the present embodiment, position recognition of the liquid drop ejection head 3 is performed by image recognition (pattern recognition) of the two outermost ejection nozzles 57a and 57a in either nozzle row 53. do. By the way, depending on the discharge object liquid, the shape of the meniscus formed in the discharge nozzle (nozzle port 63) 57 may not be constant (refer the virtual line in FIG. 6B), and it recognizes in pattern recognition There is a possibility of becoming NG.
[321] Therefore, in this embodiment, two nozzle reference marks 65 and 65 are formed in the vicinity of the two outermost discharge nozzles 57a and 57a. That is, in the nozzle formation surface 52, the position where the two discharge nozzles 57a and 57a were moved in parallel, more precisely, the nozzle row 53 was parallelly moved (must be orthogonal to the nozzle row 53) Two nozzle reference marks 65, 65 are formed by the laser etching etc. in the position corresponding to both discharge nozzles 57a and 57a. The two nozzle reference marks 65, 65 are guaranteed for the two discharge nozzles 57a, 57a, and the two nozzles when the image recognition at the two discharge nozzles 57a, 57a is unstable. Image recognition is performed using the reference marks 65 and 65. In addition, as long as the two nozzle reference marks 65 and 65 are positionally guaranteed with respect to the two discharge nozzles (strictly possible by any two discharge nozzles 57 and 57 spaced apart) 57a and 57a, As long as it is sufficiently separated, you may provide in any position of the nozzle formation surface 52. FIG.
[322] The liquid droplet discharge head 3 configured in this way protrudes from the mounting opening 18 formed in the carriage 2 to the rear side of the carriage 2, and the edge portion of the mounting opening 18. It is screwed in the said flange part 58 part to the head holding member 4 allocated to. In addition, the head holding member 4 is temporarily fixed to the carriage 2 by adhesion, and thereafter, the head holding member 4 is fixed by mechanical fixing means.
[323] Next, the head holding member 4 will be described with reference to FIGS. 8 and 9. The head holding member 4 is an intermediate accessory for stably attaching the liquid drop ejecting head 3 to the carriage 2, and is formed in a substantially rectangular flat plate shape made of stainless steel or the like. The head holding member 4 is formed with a rectangular insertion opening 71 into which the head main body 50 of the liquid drop ejecting head 3 is inserted. In this case, the head holding member 4 is set on the rear side of the carriage 2 so as to pass the mounting openings (opening portions 18a) 18 at both ends in the long side direction thereof, and the liquid drop is discharged. The head 3 is set in front of the carriage 2 so that the head main body 50 is inserted into the insertion opening 71 (refer FIG. 5).
[324] Around the insertion opening 71 of the head holding member 4, two through holes 72 and 72 and two small screws 73 corresponding to the two screw holes 59 and 59 of the flange portion 58. 73 and two protruding position regulating pins 74 and 74 are arranged. Two through holes 72 and 72 are formed in two boss portions 75 and 75, respectively, protruding toward the mounting opening 18 side. In this case, each boss part 75 is comprised by the cylindrical collar press-fitted into the head holding member 4. These two bosses 75, 75 and two protruding position regulating pins 74, 74 are both disposed at point symmetrical positions with respect to the center of the insertion opening 71, and these bosses 75, 75 and The projecting position regulating pins 74 and 74 abut against the flange portion 58 of the head main body 50, whereby the ejection dimension from the carriage 2 of the liquid drop ejection head 3 is restricted.
[325] Moreover, on the centerline of the insertion opening 71, two engaging holes 76 and 76 are formed in the outer side of the insertion opening 71. As shown in FIG. These two coupling holes 76 and 76 are the site where the assembly jig C of the liquid drop ejecting head 3 to be described later is mounted, and the coupling pins 343 and 343 for position correction in the assembly device A. This is also the site where it is bound. In this case, the two coupling holes 76 and 76 have a circular shape on one side and a long oval shape on the other side so that the mounting jig C or the coupling pin 343 can be performed without difficulty. have.
[326] Moreover, on the centerline of the insertion opening 71, the two adhesive injection holes 77 and 77 are formed in the symmetrical position by sandwiching the insertion opening 71 between both ends of the head holding member 4, respectively. Each adhesive injection hole 77 is a long hole extending in the transverse direction of the head holding member 4, and the end portion of the carriage 2 side of the long hole is beveled (see Fig. 8). Both ends of the head holding member 4 having the two adhesive injection holes 77 and 77 formed therein are bonding sites 78 and 78 for adhering the head holding member 4 to the carriage 2. The adhesive injected from the injection hole 77 diffuses and arrives at the interface portion between the carriage 2 and the bonding sites 78 and 78 by capillary action.
[327] In this case, the adhesive injection holes 77a (77b) formed on the outside (inside) of one end and the adhesive injection holes 77a (77b) formed on the inside (outside) of the other end are respectively paired. Although details will be described later, the assembling apparatus A has two adhesive injection nozzles 387 and 387, and the two adhesive injection nozzles 387 and 387 are paired with two adhesive injection nozzles 77a and 77a. It is inserted at the same time to inject the adhesive, and at the same time move in the direction of the center line, it is inserted into the other two non-adhesive injection holes (77b, 77b) at the same time to inject the adhesive.
[328] In addition, reference numerals 79 and 79 in the figure denote a pair of fastening holes used when temporarily mounting the head holding member 4 to the carriage 2 (details will be described later), and the pair of fastening holes 79 and 79 Are respectively located in the vicinity of the adhesive injection holes 77 and 77 at a point symmetrical position with respect to the center of the insertion opening 71. In addition, a pair of temporary fastening screw holes 20 and 20 corresponding to the pair of fastening holes 79 and 79 are formed in the opening portion 18a of the carriage 2 (see FIG. 11).
[329] By the way, with respect to the carriage 2 positioned via a pair of reference pins 12 and 12, each liquid droplet discharge head 3 references the nozzle row (ejection nozzles 57) 53 which are the output stages. In the X-axis, Y-axis, and θ-axis directions. More specifically, since the two nozzle rows 53 and 53 are guaranteed the mutual positional accuracy at the manufacturing stage, the two discharge nozzles 57a and 57a located at the outermost end of either nozzle row 53 are shown. Is taken as a positioning criterion and this is recognized. In addition, the four sides of the tip end portion of the liquid drop ejecting head 3 in the head body 50 (strictly, the four sides of the tip portion over the width of several millimeters of the pump portion 48) are also mutually at the manufacturing stage. Positional accuracy is guaranteed.
[330] On the other hand, the liquid droplet discharge head 3 is a form fixed to the carriage 2 via the head holding member 4. Therefore, in this embodiment, the assembly jig C is used, and the liquid droplet discharge head 3 is positioned on the head holding member 4 on the basis of four sides of the tip end of the head main body 50. After the screw is fixed, the liquid drop discharge head 3 having the head holding member 4 is positioned and temporarily fixed on the basis of the two discharge nozzles 57a and 57a. That is, the liquid droplet discharge head 3 is temporarily positioned at the head holding member 4 by manual operation using the assembling jig C, and image recognition in the continuous assembly device A (discharge nozzles 57a, 57a), the present position is determined.
[331] In the assembling device A of the embodiment, in order to speed up the position recognition, the two recognition cameras 353 and 353 fixedly provided with the two discharge nozzles 57a and 57a are simultaneously recognized. In other words, two recognition cameras 353 and 353 are simultaneously captured in the field of view. Therefore, the temporary positioning of the liquid drop ejection head 3 using the assembling jig C is performed by the two recognition cameras 353 and 353 based on the position data set at the step of the present positioning. When the discharge nozzles 57a and 57a are faced with each other, the discharge nozzles 57a and 57a do not depart from the visual field.
[332] Here, with reference to FIG. 9 and FIG. 10, the assembly jig C of the liquid droplet ejection head 3 is demonstrated, and the liquid droplet ejection head 3 is used for this head holding member using this assembly jig C. As shown in FIG. The assembling method to assemble to (4) will be described. As shown in FIG. 10, the assembling jig C includes the jig main body 81 for positioning the head main body 50 of the liquid drop ejecting head 3, and the jig main body 81 to the head holding member 4. It consists of a pair of mounting pins 82 and 82 mounted in the positioning state.
[333] The jig main body 81 is roughly " C " by a longitudinal edge 84 and a pair of horizontal edge portions 85 and 85 extending at right angles from both ends of the longitudinal edge 84. It is formed integrally in the shape of a child. On the other hand, the pair of mounting pins 82, 82 protrude from the rear side of the side edge portions 85, 85, respectively, and the pair of mounting pins 82, 82 engage the holes 76 of the head holding member 4 with each other. , 76, the jig main body 81 is attached to the head holding member 4.
[334] In the site | part which extended from the inner side of the longitudinal side part 84 to the inner side of one side edge part 85, the positioning part 86 of substantially "L" shape is formed, and the head main body 50 is provided in this positioning part 86. The liquid droplet ejection head 3 is positioned on the head holding member 4 by bringing one of the long sides and the short sides thereof into contact with each other. The positioning portion 86 is thinly formed with the front face the same as the other portion, and the corner portion 86a is formed concave in a semicircular shape. In addition, the jig main body 81 is attached to the head holding member 4 so that the surface and the nozzle forming surface 52 of the liquid drop ejecting head 3 are approximately the same surface (the same level). The thickness is designed.
[335] As a result, the head main body 50 is positioned so that the distal end portion of the head main body 50 abuts against the positioning portion 86 of the assembling jig C. That is, in the manufacturing step, two adjacent sides of the four sides of the tip end portion of the head body 50 in which the positional accuracy is guaranteed with respect to the nozzle row 53 are transferred to the positioning portion 86 of the assembling jig C. By colliding, the liquid drop ejecting head 3 is positioned in the head holding member 4.
[336] On the other hand, the pair of mounting pins 82 and 82 are arranged to coincide with the center line of the head main body 50 that has collided with the positioning portion 86. More specifically, the long side portion 86b of the positioning portion 86 is formed in parallel with a straight line connecting the pair of mounting pins 82 and 82, and the spacing dimension thereof is the long side of the head body 50. It is managed according to the position and is formed in 1/2 dimension of the short side of the head main body 50. In addition, the short side portion 86c of the positioning portion 86 is formed at right angles to the long side portion 86b, and the distance from the mounting pin 82 positioned on the short side portion 86c side is the head body. It is managed in accordance with the short side position of (50).
[337] Thereby, even if the assembling jig C is attached to the head holding member 4 in the state where it is rotated 180 degrees from the state of FIG. 9, the liquid droplet discharge head 3 can be positioned without causing any special trouble. have. That is, although the planar shape is not symmetrical in the assembly jig | tool C of embodiment, it has a structure which is not biased by either of right and left.
[338] Next, with reference to FIG. 9, FIG. 11, and FIG. 12, the assembly method with respect to the head holding member 4 of the liquid droplet discharge head 3 using said assembly jig C is demonstrated. This assembling work is performed by hand as an external step of the assembling apparatus A. FIG. First, four support angles 88, 88, 88, and 88 are screwed to the front edge of the carriage (strictly the body plate 11) 2. Next, the carriage 2 is inverted up and down, and the carriage 2 is set in the state which floated by the support angle 88. In addition, although not shown in figure, it is preferable to attach the said pair of support members 13 and 13 and the pair of reference pins 12 and 12 to the carriage 2 in this state.
[339] Next, the liquid droplet discharge head 3 with the head main body 50 upward is inserted into the mounting opening 18 from the lower side of the carriage 2. Here, the head holding member 4 is set on the carriage 2 by positioning and inserting the insertion opening 71 of the head holding member 4 into the head main body 50 from the upper side of the carriage 2. . When the head holding member 4 is set, the head main body which attaches the assembly jig C to the head holding member 4 from the upper side and opposes this to the positioning portion 86 of the head holding member 4 ( Press both sides of 50) firmly. In addition, a plurality of assembling jig Cs may be prepared and mounted on the head holding member 4 in advance, and then work may be started.
[340] Subsequently, while keeping the above pressing state, two small screws 73 and 73 are screwed into the flange portion 58 of the liquid drop ejecting head 3 from the upper side through the head holding member 4, respectively. The liquid drop ejecting head 3 is fixed to the head holding member 4. Next, as a means for ensuring that the fields of view of the two recognition cameras 353 and 353 do not deviate from the two discharge nozzles 75a and 75a, for temporarily tightening the carriage 2 from the pair of fastening holes 79 and 79. Fixing screws 89 and 89 are respectively screwed into the screw holes 20 and 20 in a temporary fastening state (see Fig. 9).
[341] Thereby, alignment of the liquid drop ejection head 3 with respect to the carriage 2 is attained in the range of the dimensional intersection of the fixing screw 89 and the fastening hole 79, and the two recognition cameras 353 353 does not deviate from the two discharge nozzles 75a and 75a. Thus, by repeating positioning and fixing with respect to the head holding member 4 of the liquid drop ejecting head 3 in turn, twelve liquid drop ejecting heads 3 are separately assembled to the head holding member 4. . Finally, the assembly jig C is pulled out of the head holding member 4 and four support angles 88 are removed at the same time to complete the work.
[342] As described above, the twelve liquid drop discharge heads 3 are assembled to the twelve head holding members 4 with the carriage 2 sandwiched therebetween, but in this state, the twelve liquid drop discharge heads 3 It is not fixed to (2) and is in a suspended state. That is, the twelve liquid drop ejecting heads 3 having the head holding member 4 are temporarily mounted in such a manner that the liquid droplet ejection heads 3 are movable in the small size within the dimensional intersection range of the fixing screw 89 and the fastening hole 79 with respect to the carriage 2. It is. In addition, this fixing screw 89 is a machining screw, and in the assembling apparatus A, it is removed after the head holding member 4 is adhered (temporarily fixed) to the carriage 2. In other words, in the embodiment, the main bone fastening by the screw to the carriage 2 of the head holding member 4 is not performed (it is press-fixing by a separate member).
[343] And the head unit 1 to which the twelve liquid droplet discharge heads 3 which have the head holding member 4 in the carriage 2 was temporarily mounted is introduce | transduced into the assembling apparatus A, and this is in a state of up-down inversion posture. Is set. In addition, the head unit 1 introduced into the assembling apparatus A constitutes the pair of supporting members 13 and 13 and the reference pins 12 and 12 in the above-described main components, and in the drawing apparatus B, The head unit 1 to be introduced further comprises a handle 14, both of the assemblies 15, 16, and the like.
[344] Here, the drawing device B will be described briefly, and the set method of the head unit 1 for mounting the head unit 1 to the drawing device B using the pair of handles 14 and 14 will be described. do. In addition, with respect to the structure of the head main body 50 of the liquid drop ejection head 3, the wiping device of the drawing device B will also be briefly described.
[345] FIG. 13 is a conceptual diagram schematically showing the drawing device B. As shown in FIG. 13, the drawing device B mounts the head unit 1 and moves the head to move it in the Y-axis direction and the θ-axis direction. Substrate 101, a substrate moving part 103 which opposes the head moving part 101 and moves the substrate 102 such as a color filter in the X-axis direction, and the liquid drop ejecting head 3 of the head unit 1. ) Is provided with a maintenance unit 104 for holding. The head moving unit 101 moves the head unit 1 mounted thereon between the unit introduction unit 105 and the maintenance unit 104 with the substrate moving unit 103 interposed therebetween.
[346] When the head unit 1 is introduced and set, the head moving part 101 moves to the unit introduction part 105 side, and the temporary mounting table 106 faces the unit introduction part 105. The head unit 1 is set to be temporarily placed on the temporary placing table 106 and connected to the pipe and the wiring, and then sent to the head moving unit 101. In the preparation process for initial positioning of the head unit 1, the micro-movement (angle correction) in the θ-axis direction of the head unit 1 is executed. In the manufacturing process for discharging the filter material, the substrate 102 In the X-axis direction, the head unit 1 also moves in the Y-axis direction, whereby the main scan and the sub-scan of the liquid drop ejection head 3 are executed.
[347] The head moving unit 101 includes a main carriage 111 for supporting the head unit 1 so as to extend along the side, a θ table 112 for moving the main carriage 111 in the θ axis direction, and a θ table 112. Has a Y table 113 for moving the head unit 1 in the Y axis direction. In addition, the substrate moving part 103 has a substrate set table 115 which is set to suck the substrate 102 and an X table 116 which moves the substrate in the X-axis direction through the substrate set table 115. have.
[348] In this case, the X table 116 is driven by the combination of the air slider and the linear motor, and the Y table 113 is driven by the combination of the ball screw and the servo motor (both not shown). In addition, the board | substrate recognition camera 117 is mounted in the main carriage 111 (refer FIG. 15), and the head recognition camera 118 is mounted in the board | substrate set table 115, respectively. Therefore, the pair of reference pins 12 and 12 provided in the carriage 2 of the head unit 1 are imaged by the cooperation of the head recognition camera 118 and the X table 116 which moves them in the X-axis direction. It is recognized.
[349] Here, with reference to FIG. 67, the recognition operation | movement of the pair of reference pins 12 and 12 by the head recognition camera 118 is demonstrated. First, based on the design data, the X table 116 and the Y table 113 are properly driven to move the head recognition camera 118 and the carriage (head unit 1), and one reference pin 12 is moved. It accommodates in the field of view of the head recognition camera 118. If one reference pin 12 is recognized by the head recognition camera 118, then the X table 116 is driven, and the head recognition camera 118 is moved in the X axis direction (scanning direction), and the other reference pin 12 is received within the field of view of the head recognition camera 118 to recognize this.
[350] Then, based on the recognition result of the pair of reference pins 12 and 12 by the head recognition camera 118, the X table 116, the Y table 113, and the θ table 112 are driven appropriately, and the carriage ( Position correction of the head unit 1 is executed. In addition, after the position correction, the above recognition operation is executed again for confirmation, and a series of recognition operations are completed.
[351] Subsequently, in the actual liquid drop ejection operation, the X table 116 is driven first, the substrate 102 is reciprocated in the main scanning direction, and the plurality of liquid drop ejection heads 3 are driven to drive the liquid drop ejection head. The optional liquid droplet ejection of (3) is performed. Next, the Y table 113 is driven to move the carriage (head unit 1) 2 in the sub-scan direction by one pitch, and the reciprocating movement and the liquid drop ejection in the main scan direction of the substrate 102 again. The drive of the head 3 is executed. By repeating this several times, liquid droplet ejection is performed from the end of the substrate 102 to the end (total region).
[352] In this way, since the head recognition camera 118 is moved by the X table 116 in the image recognition of the pair of reference pins 12 and 12, the Y table 113 and the like using the ball screw are different. Alternatively, the movement precision can be prevented from affecting the recognition precision. In addition, the X-axis direction, which is the moving direction of the X table 116, coincides with the main scanning direction, so that the accuracy of the liquid drop ejection (the precision of the impact point) can be improved.
[353] In addition, in this embodiment, although the board | substrate 102 which is the discharge target object is moved with respect to the head unit (carriage 2) 1, the carriage (head unit 1) 2 is moved. It may be configured to move in the main scanning direction. In addition, although the case where the pair of reference pins 12 and 12 are provided in the both ends of the long side direction of the carriage 2 can also be considered, in this case, by the relative movement of the carriage 2 to the Y-axis direction, A pair of reference pins 12, 12 are recognized.
[354] 14 and 15 are external views of the main carriage 111. The main carriage 111 includes a base plate 121 on which the head unit 1 seats, an arch member 122 supporting the base plate 121 so as to hang down, and one of the base plates 121. A pair of left and right temporary placement angles 106a and 106a which are temporary placement tables 106 provided to protrude to an end portion, and a stopper plate 123 provided at the other end of the base plate 121 are provided. The substrate recognition camera 117 is provided outside the stopper plate 123.
[355] The base plate 121 is formed with a rectangular opening 124 into which the main body plate 11 of the head unit 1 is inserted with ease, and each of the left and right openings of the base plate 121 constituting the rectangular opening 124. The edge portion 125 is positioned with two bolt holes 22 and 22 formed in each support member 13 of the head unit 1 and two through holes 126 and 126 that coincide with the pin holes 23. The crystal pin 127 is provided. In this case, the width of the rectangular opening 124 and the width of the main body plate 11 substantially coincide, and the head unit 1 set from the side has the left and right sides of the main body plate 11 to the left and right of the rectangular opening 124. It is inserted to be guided.
[356] Each temporary arrangement angle 106a has a sufficient thickness (height), is a base that is bent in an “L” shape on the outside, and is fixed to be disposed at an end of the base plate 121. In addition, the space | interval dimension of both the temporary arrangement angles 106a and 106a corresponds to the space | interval dimension of both support members 13 and 13 of the head unit 1. Therefore, the head unit 1 is temporarily disposed by the support members 13 and 13 seated on both the temporary placement angles 106a and 106a, and the base plate 121 by the two temporary placement angles 106a and 106a. Is sent to). Further, in this state, the head main body 50 of each liquid drop ejecting head 3 floats sufficiently from the base plate 121, so that contact (interference) with the base plate 121 is prevented.
[357] As shown in the image diagram of FIG. 16, when the head unit 1 is set on the base plate 121 of the main carriage 111, the handles 14 and 14 are first gripped and transported. The head unit 1 is disposed on both temporary placement angles 106a and 106a (temporary placement). Although not specifically shown here, the tube of the filter material supply system of the drawing apparatus B provided on the arch member 122 is pipe-connected to the piping connection assembly 15 of the head unit 1, and the cable of a control system is connected. The wiring connection is made to the wiring connection assembly 16 (FIG. 16A).
[358] When the connection work is completed, the handles 14 and 14 are gripped again, and the head unit 1 is pushed forward with both temporary positioning angles 106a and 106a as guides, and the tip end is inclined so as to further lower ( 16b). When the head unit 1 is inclined, the leading end of the main body plate 11 is inserted into the rectangular opening 124, and the leading ends of both the supporting members 13 and 13 are both opening edges 125 of the rectangular opening 124. , 125). When both support members 13 and 13 land on the opening edges 125 and 125, both support members 13 and 13 are lifted from both temporary positioning angles 106a and 106a, this time both support members. The head unit 1 is pushed inward toward the inside while sliding the head unit 1 on the opening edge portion 125 with the front end portions 13 and 13 as the center.
[359] And when the front end of the head unit 1 contacts the stopper plate 123, the rear part of the head unit 1 will be lowered slowly, and both pins 23 of both support members 13 and 13 will be lowered. The head unit 1 is seated on the base plate 121 so that the positioning pins 127 of the opening edge portions 125 and 125 are overlapped. Here, the four fixing screws 128 are screwed to both support members 13 and 13 through the base plate 121 from below the base plate 121, and the work is completed (FIG. 16C).
[360] Thus, since the head unit 1 is temporarily arrange | positioned in the unit introduction part 105 and necessary piping connection and wiring connection are made in this state, these connection operations are easy to perform, and the head after a connection operation is carried out. The unit 1 can be appropriately set in a narrow space. In addition, since the head unit 1 is set while sliding from the temporary placement angle 106a to the base plate 121 which is one step lower, the head unit 1 is soft landed on the main carriage 111. The heavy head unit 1 can be set smoothly without impact.
[361] On the other hand, in the maintenance part 104 of the drawing apparatus B, the wiping apparatus is provided so that it may be provided in parallel with a capping apparatus or a cleaning apparatus. As shown in FIG. 17, the wiping device 108 includes a wiping unit 132 including a wiping sheet 131, and a moving mechanism for advancing and wiping the wiping unit 132 toward the head unit 1 ( 133). With respect to the head unit 1 introduced into the maintenance unit 104 by the Y table 113, the moving mechanism 133 moves the wiping unit 132 in the X-axis direction (main scanning direction) to Ping operation.
[362] The wiping unit 132 winds up the feeding reel 135 winding the wiping sheet 131 in a roll shape and the wiping sheet 131 taken out from the feeding reel 135. The wiping roller 137 is provided between the winding reel 136 and the feeding reel 135 and the winding reel 136 through the wiping sheet 131. In addition, a guide roller 138 serving as a rotational speed detection shaft is provided between the feeding reel 135 and the wiping roller 137, and a cleaning liquid supply head 139 is provided near the wiping roller 137.
[363] The feeding reel 135 is braked and rotated by the torque limiter provided therein, and the winding reel 136 is driven and rotated by the motor provided therein. The wiping sheet 131 drawn out from the feeding reel 135 exits the guide roller 138 and is rerouted, receives the supply of the cleaning liquid from the cleaning liquid supply head 139, and then rotates the wiping roller 137. It is wound up by the winding reel 136.
[364] The wiping roller 137 is a free rotating roller, and is composed of a rubber roller having elasticity or flexibility. The wiping roller 137 at the time of wiping acts to press the wiping sheet 131 against the head main body 50 of each liquid droplet discharge head 3 from below. In addition, during wiping, the wiping roller 137 is rotated by the wiping sheet 131 which is driven by the winding reel 136, and the wiping unit 133 as a whole by the moving mechanism 133. Move in the X-axis direction. As a result, the wiping sheet 131 comes into sliding contact with the lower surface of the head unit, that is, the head main body 50 of the twelve liquid drop discharge heads 3 in sequence. In other words, the wiping sheet 131 travels in the reverse direction with respect to the relative movement direction of the head main body 50, and the nozzle formation surface 52 of each head main body 50 is wiped.
[365] To the wiping sheet 131 in sliding contact with the head main body 50, a cleaning liquid, that is, a solvent of a filter material, is supplied from the cleaning liquid supply head 139 immediately before reaching the wiping roller 137. do. Thereby, the filter material attached to the nozzle formation surface 52 of each head main body 50 is wiped clean by the wiping sheet 131 which impregnated the cleaning liquid via the wiping roller 137. do. In addition, as mentioned above, since the lower end of the head main body 50 is beveled by the resin 62 molded in this, the head main body 50 is used as the wiping sheet 131 at the time of this wiping. It doesn't work.
[366] Next, the alignment mask D will be described with reference to FIGS. 18 and 19. In the assembling apparatus A of the embodiment, it is necessary to always supply the head unit 1 having a certain level of assembly accuracy regardless of the number of assembly of the head units 1. Therefore, the alignment mask D which marked the reference position of the carriage 2 and the twelve liquid drop discharge heads 3 is prepared. That is, the alignment mask D is made circular (original plate) of a component position, and the head unit 1 as a duplication is comprised by this assembly apparatus A. FIG. Thereby, it is made to exclude the precision influences, such as the characteristic which each assembly apparatus A has with respect to the head unit 1, and time-lapse change.
[367] The alignment mask D includes a master plate 161 having a mask pattern formed on the reference position of the carriage 2 and the reference position of each liquid drop ejecting head 3, and a plate holder holding the master plate 161 from below. 162. As described above, each of the liquid drop ejecting heads 3 is provided to be inclined at a predetermined angle (angles of 40 ° to 60 °) with respect to the main scanning direction. Therefore, the master plate 161 and the plate holder 162 are formed in accordance with this inclination angle.
[368] More specifically, the master plate 161 corresponds to the head main body 50 of the liquid drop ejecting head 3 that is mounted obliquely, and is rectangular by two sides parallel to the long side and two sides parallel to the short side. It is formed to prevent unnecessary parts from occurring. In addition, the master plate 161 is comprised from thick and transparent quartz glass so that abnormality may not generate | occur | produce as a circular shape.
[369] On the surface of the master plate 161, one set of five head reference marks 164, 164, 164, 164, and 164 representing the reference position of each liquid drop ejection head 3 is set to 6, and this is set to 6 on both sides. 12 sets in total are formed. On the outside of the 12 sets of head reference marks 164, a pair of carriage reference marks 165 and 165 indicating the reference position of the carriage 2 is formed. In the vicinity of the head reference mark 164 located at the end, a subject image 166 for adjusting the pixel resolution of the recognition camera 353 is formed.
[370] Each of the five head reference marks 164 is a total of four located at the center position of the nozzle forming surface 52 in the liquid drop ejecting head 3 and at the outermost ends of the two rows of nozzle rows 53 and 53, respectively. The positions of the discharge nozzles 57, 57, 57, 57 are indicated. As shown in Fig. 18A, each head reference mark 164 is formed by drawing a hollow cross inside the circular line and drawing a diagonal line in the circle except the cross. Therefore, when the image is recognized (photographed) by the recognition camera 353, a cross of light color is recognized inside the dark circular part.
[371] Similarly to the above, each carriage reference mark 165 is also formed by drawing a hollow cross inside the circular line and drawing a diagonal line in the circle except for the cross. The subject image 166 is formed of a plurality of lines in the vertical and horizontal directions drawn in a lattice shape with good accuracy. In addition, since the head reference mark 164 which shows the center position of the nozzle formation surface 52 can be computed from the four head reference marks 164 which show the position of the four discharge nozzles 57, it can also abbreviate | omit. . The pattern formed on the alignment mask D is formed by forming an opaque film represented by a metal such as Cr on one surface and patterning the film using semiconductor technology.
[372] As shown in FIGS. 19 and 20, the plate holder 162 includes a substantially rectangular master support plate 168 formed one round larger than the master plate 161, and a rear surface 4 of the master support plate 168. Four urethane blocks (169, 169, 169, 169) attached to the four corners and a plurality of urethanes for vertically and horizontally positioning the master plate 161 provided on the surface of the master support plate 168. The stopper 170, a plurality of support pins 171 for supporting the master plate 161 in a state of being floated on the master support plate 168, and corresponding to the support pins 171 are provided to correspond to the master plate 168 A plurality of pressing blocks 172 pressed from the upper side are provided.
[373] Two urethane stoppers 170 are respectively assigned to four sides of the master plate 161. In addition, the plurality of support pins 171 are disposed at two corner portions of the master plate 161, respectively, and are attached to the master support plate 168 so that the height can be adjusted. That is, each support pin 171 has the structure of the adjustment bolt, and it is possible to adjust the level of the surface of the master plate 161, ie, the mark formation surface 161a. The plurality of push blocks 172 correspond to the support pins 171, respectively, and hold the master plate 161 between the support pins 171 so as to press the master plate 161.
[374] The alignment mask D configured as described above is fixed to the set table 231 of the assembling apparatus A described later. Therefore, the two fixing holes 173 and 173 and the pin hole 174 arrange | positioned between two fixing holes 173 and 173 are formed in each edge part of the left and right of the master support plate 168. As shown in FIG. And the alignment mask D and the head unit 1 are exchange-set by the set table 231 of the assembly apparatus A. FIG.
[375] Next, the assembling apparatus A and the assembling method of the liquid droplet discharge head 3 are demonstrated. The assembling apparatus A uses the said head unit 1 which temporarily mounted twelve liquid droplet discharge heads 3 to the carriage 2 as an assembly object, and attaches to the carriage 2 of the head unit 1, respectively. The liquid drop ejection head 3 is positioned and bonded (temporarily fixed) with good accuracy. In addition, in this assembling apparatus A, the head unit 1 which temporarily fixed the liquid droplet discharge head 3 is set to the drawing apparatus B through a washing | cleaning process and component composition processes, such as the said handle 14 and the like. .
[376] As shown in the external view of FIGS. 21-25, the assembly apparatus A has the transparent safety cover 202 on the mount 201, The air supply apparatus 203, etc. are attached to the mount 201. At the same time, the main structural unit 205 is accommodated in the safety cover 202 so as to be disposed on the base 204. The mount 201 is provided with a support angle 207 having four casters 206 and six adjustment bolts. On the front of the safety cover 202, an opening / closing door 208 for introducing the head unit 1 is provided, and a warning light 209 is provided on the upper surface thereof.
[377] The main constituent device 205 includes a unit moving device 211 that mounts the head unit 1 and moves it in the X, Y, and θ directions within a horizontal plane, and discharges each liquid drop temporarily mounted on the carriage 2. Position of the head correction device 212 for correcting the position of the head 3, the temporary fixing device 213 for attaching each liquid drop discharge head 3 to the carriage 2, and the liquid drop discharge head 3. Recognizing device 214 for recognizing position of carriage 2 and each liquid drop ejecting head 3 before correction, these unit moving device 211, head compensating device 212, temporary fixing device 213 and recognition The control apparatus (refer FIG. 50) 215 which controls the apparatus 214 collectively is provided.
[378] In this assembling apparatus A, said alignment mask D is introduce | transduced into the unit movement apparatus 211 previously, and each reference mark 164,165 of the alignment mask D is imaged by the recognition apparatus 214. Recognize and store the reference position data of the carriage 2 and each liquid drop discharge head 3, and position the carriage 2 and each liquid drop discharge head 3 based on this reference position data (master data). Calibration is performed. In addition, the alignment mask D is regularly introduced not only at the time of introduction assembly of the new head unit 1 but also at the same head unit 1 based on the number of assembly or the operation time thereof. Of course, the reference position data is reset at that time.
[379] On the other hand, the head unit 1 is set on the upper surface of the unit moving device 211 with the head main body 50 of each liquid drop ejecting head 3 upward, and the assembly of the head unit 1 is first recognized as a recognition device. Starting from the positional recognition of the carriage 2 by 214. When the carriage 2 is position recognized, the recognition data and the reference position data are compared, and based on the comparison result, the position movement of the carriage 2 is executed by the unit moving device 211. Next, the liquid drop ejection head 3 is position-recognized by the recognition device 214, and the position correction of the liquid drop ejection head 3 is performed by the head correction device 212 based on the recognition result (comparison result). Is executed.
[380] Subsequently, the liquid drop ejection head 3 is adhered to the carriage 2 via the head holding member 4 by the temporary fixing device 213 while maintaining this position correction state. In addition, at this time, the head correction apparatus 212 presses the liquid drop ejection head (head holding member 4) 3 so as not to move until the adhesive is cured. Then, the process from the position recognition of the liquid drop ejection head 3 to the adhesion is repeated by the number of the liquid drop ejection heads 3, so that the temporary fixing of the entire liquid drop ejection head 3 is completed.
[381] As shown in FIG.21 and FIG.26, the unit moving apparatus 211 is arrange | positioned with the large occupied area to the plate-shaped base 204 supported horizontally by the three adjustment bolt 217. As shown in FIG. The unit moving device 211 includes a set table 231 for setting the head unit 1 in an inverted state, a θ table 232 for supporting the set table 231 from the lower side, and a θ table 232 from the lower side. A supporting X and Y table 233 is provided. The head unit 1 is set inclined according to the inclination of the liquid drop ejecting head 3 mounted with the set table 231. Therefore, the direction corresponding to the main scanning direction of the liquid drop discharge head 3 becomes the X axis direction, and the sub scanning direction becomes the Y axis direction.
[382] As shown in FIG. 27, the set table 231 includes a rectangular base plate 235 having a plurality of circular extraction holes 236, and a pair of band-shaped blocks 237 fixed to both sides of the base plate 235. 237). The positioning pin 238 is provided on the upper surface of each band-shaped block 237 and two screw holes 239 and 239 are formed. That is, the head unit 1 is positioned with respect to the set table 231 in two places of right and left, and is screwed in four places in total. In the center portion of the base plate 235, four through holes 240 and the like for fixing the set table 231 to the θ table 232 are formed.
[383] In this manner, the head unit 1 is fixed to the θ table 232 via the set table 231, and the alignment mask D is also fixed to the θ table 232 via the set table 231. In this case, the head unit 1 and the alignment mask D are formed on the nozzle forming surface 52 of each liquid drop ejecting head 3 of the head unit 1 fixed to the θ table 232, and the θ table 232. Is formed so that the mark formation surface (surface of the master plate) 161a of the alignment mask D fixed to the ()) is located in the same horizontal plane.
[384] Similarly, the weight of the head unit 1 and the weight of the alignment mask D including the plate holder 162 are designed to be approximately the same weight. As a result, the position recognition operation of the alignment mask D and the position recognition operation of the head unit 1 can be performed under exactly the same conditions. In addition, the set table 231 becomes a dedicated part with respect to the head unit 1, and when the head unit 1 changes, the set table 231 also changes accordingly.
[385] Next, the θ table 232 will be described with reference to FIGS. 28, 29, and 30. The θ table 232 is composed of a rotation actuator 242 for minutely rotating (microscopically rotating) the head unit 1 via the set table 231, and a retraction drive unit 243 for driving the rotation actuator 242. It is. The rotary operation unit 242 rotates the table main body 245 to which the set table 231 is fixed, the connection arm 246 extending from the table main body 245 toward the retreat drive unit 243, and the table main body 245. It has the roller ring 247 which supports it possible, and the support stand 248 which supports the roller ring 247. As shown in FIG. In this case, the set table 231 is positioned on the upper surface of the table main body 245 via two positioning pins 250 and 250 and four screw holes 251 provided on the table main body 245. It is screwed in the state.
[386] The retraction drive unit 243 includes a θ table motor (servo motor) 253 constituting a power source, a ball screw 256 connected to the main shaft 254 of the θ table motor 253 through a coupling 255, A female screw block 257 to which the ball screw 256 is screwed, and a main slider 258 to slidably support the female screw block 257 in the axial direction (in the X-axis direction) of the ball screw 256, An arm receiving portion 260 to which the distal end of the connecting arm 246 is connected, a vertical shaft member 262 pivotally supporting the arm receiving portion 260 through a bearing 261, and a female thread block 257. ), There is a sub slider 263 that supports the vertical axis member 262 to be slidable in the Y-axis direction.
[387] The θ table motor 253 is configured to be capable of forward and reverse rotation. When the θ table motor 253 rotates forward and backward, the female screw block 257 is guided to the main slider 258 by the ball screw 256. Retreat in the X-axis direction. When the female thread block 257 advances and retreats, the sub slider 263 and the vertical shaft member 262 supported by this also advance and retreat in the X-axis direction. In addition, when the vertical shaft member 262 advances and retreats, the connecting arm 246 and the table main body 245 are centered on the axis of the table main body 245 through the female accommodation portion 260 which is attached thereto. Rotate. That is, the table main body 245 rotates positive and negative in the horizontal plane (normal and forward movement in the θ direction).
[388] In addition, according to this rotation, the distance between the center of the table main body 245 and the vertical axis | shaft member 262 changes, but the change of this distance is performed by the sub slider 263, and the vertical axis | shaft member 262 is suitably fine in a Y-axis direction. It is absorbed by moving. Further, the moving end of the female screw block 257 is formed by the light blocking plate 265 protruding from the female thread block 257 and three photointerrupters 266 facing the light blocking plate 265 as the female thread block 257 advances. The position, that is, the rotation range (angle) of the table main body 245 is regulated (prevention of overrun).
[389] The forward and backward drive unit 243 is supported by a support plate 267 provided below the main slider 258, and the support plate 267 is fixed to the support 248 of the rotary operation unit 242. And this support stand 248 is arrange | positioned at the X-Y table 233. As shown in FIG.
[390] Next, with reference to FIG. 26, FIG. 31, and FIG. 32, the X * Y table 233 is demonstrated. The X-Y table 233 includes a support block 270 for supporting the θ table 232 from below, an X-axis table 271 for slidably supporting the support block 270 in the X-axis direction, and an X-axis The Y-axis table 272 which supports the table 271 slidably in the Y-axis direction is provided. The support block 270 has screw holes 274 at four places, and the θ table 232 is fixed to the support block 270 via the screw holes 274 at these four places.
[391] The X-axis table 271 is comprised with the X-axis air slider 276, the X-axis linear motor 277, and the X-axis linear scale 278 attached to the X-axis air slider 276. As shown in FIG. Similarly, the Y-axis table 272 is comprised with the Y-axis air slider 279, the Y-axis linear motor 280, and the Y-axis linear scale 281 attached to the Y-axis air slider 279. As shown in FIG. Reference numerals 282 and 283 in the figures denote X-axis cable bears and Y-axis cable bears, respectively. Reference numeral 284 denotes amplifiers of both linear motors 277 and 280.
[392] The X-axis linear motor 277 and the Y-axis linear motor 280 are appropriately controlled and driven to move the θ table 232 in the X-axis direction and the Y-axis direction. That is, the head unit (or alignment mask D) 1 set in the set table 231 is moved in the θ axis direction by the θ table 231 in the horizontal plane, and is connected to the X and Y tables 233. By the X-axis direction and the Y-axis direction.
[393] Next, the head correction apparatus 212 will be described. The head correction device 212 uses the head holding member 4 to move the liquid drop discharge head 3 through the X and Y axes based on the positional recognition of the liquid drop discharge head 3 by the recognition device 214. And minute movement in the θ-axis direction to perform positioning (position correction) of the liquid drop ejection head 3. At the same time, the head correction device 212 cooperates with the temporary fixing device 213 to function to press the head holding member 4 against the carriage 2 until the adhesive solidifies.
[394] As shown in FIG. 23 and FIG. 33, the head correction device 212 includes a correction device stand 301 attached to the inside of the base 204, a correction XY table 302 disposed therein, It consists of the correction (theta) table 303 supported by the correction X and Y table 302, and the arm unit 304 supported by the correction (theta) table 303. As shown in FIG. In this case, since the correction θ table 303 has the same structure as that of the θ table 232 of the unit moving device 211, the description is omitted here. Further, in the θ table 232, the advancing and driving part 243 is disposed on the left side, but in the correction θ table 303, it is disposed on the right side (see FIG. 23).
[395] As shown in FIG. 33, the correction device stand 301 includes a base plate 307 on which the correction XY table 302 is disposed, and three sets of angle units that support the base plate 307. (308, 308, 308). The three sets of each unit 308 are arranged in three positions at the left side, the right side, and the center rear portion, and are fixed on the upper and lower sides of the pair of struts 309 and 309 and the pair of struts 309 and 309, respectively. The upper plate 310 and the lower plate 311 are configured.
[396] In this case, the head unit 1 moving by the unit moving device 211 faces the lower space of the stand 301 for calibrating, and the arm unit 304 protruding from the stand 301 for calibrating is It faces the head unit 1 from the upper side (coupling with the head holding member 4). And the movement of the head unit 1 and the position correction of the carriage 2 are performed by the unit moving apparatus 211, and the position correction of each liquid drop head 3 is performed by this head correction apparatus 212. do. Therefore, after any one liquid drop ejection head 3 is temporarily fixed, the unit moving device 211 moves the head unit 1 to move the next liquid drop ejection head 3 to the head correction device 212. Get rid of.
[397] 33 to 36, the correction X-Y table 302 is disposed at the center of the correction device stand 301, and supports a support block 314 for supporting the correction Table 303, and a support. A correction X axis table 315 for slidably supporting the block 314 in the X axis direction, and a correction Y axis table 316 for slidably supporting the correction X axis table 315 in the Y axis direction. . The support block 314 has screw holes 318 at four places, and the correction Table 303 is fixed to the support block 314 via the screw holes 318 at these four places.
[398] The correction X-axis table 315 is composed of an X-axis air slider 320, an X-axis linear motor 321, and an X-axis linear scale 322 provided in parallel with the X-axis air slider 320. Similarly, the correction Y-axis table 316 is composed of a Y-axis air slider 323, a Y-axis linear motor 324, and a Y-axis linear scale 325 provided in parallel to the Y-axis air slider 323. Reference numerals 326 and 327 in the figure denote X-axis cable bears and Y-axis cable bears, respectively, and reference numeral 328 denotes amplifiers of both linear motors 321 and 324.
[399] 37, 38, and 39, the arm unit 304 includes a pair of engagement arms 331 and 331 that couple to the pair of engagement holes 76 and 76 of the head holding member 4, and a pair of engagement arms 331 and 331. The bracket 332 which supports the coupling arms 331 and 331 of this, the arm lifting mechanism 333 which raises and lowers the bracket 332, and the support stand 334 which supports the arm lifting mechanism 333 is comprised. The support 334 includes a fixed plate 336 fixed to the correction table 303, a pair of L-shaped arms 337 and 337 extending forward from the fixed plate 336, and a pair of L-shaped arms 337 and 337. It consists of the vertical plate 338 fixed to the front end of the (), and extends in an inverted "L" shape toward the front side.
[400] The arm elevating mechanism 333 includes an elevating slider 340 for supporting the bracket 332 to elevate and an air cylinder 341 fixed to the lower portion of the vertical plate 338 and elevating the elevating slider 340. have. The air cylinder 341 is connected to the air supply device 203 described above, and the bracket 332 is raised and lowered by using the lifting slider 340 as a guide by switching the air valve or the like. The bracket 332 is formed in the "L" shape, and the tip is formed in two branches. Coupling arms 331 and 331 are attached downward to these two prongs, respectively.
[401] As shown in FIG. 40, each coupling arm 331 includes a coupling pin 343 inserted into the coupling hole 76 of the head holding member 4, and a pin holder for holding the coupling pin 343 up and down. 344 and a coil spring 345 which is built in the pin holder 344 and presses the coupling pin 343 downward. The upper end of the pin holder 344 is fixed to the bracket 332 so as to fit from the lower side. The distal end portion of the engaging pin 343 is formed in a tapered shape, and the tapered portion 347 has a large diameter at the proximal side with respect to the engaging hole 76 of the head holding member 4, and a small diameter at the distal end side ( It is formed as small. As a result, the coupling pins 343 are not loosely coupled to the coupling holes 76.
[402] In the initial state, both coupling arms 331 and 331 are moved to the up-end position by the air cylinder 341, and after moving the head unit 1 by the unit moving device 211, the air cylinder ( When both engagement arms 331 and 331 are lowered by 341, the pair of engagement pins 343 and 343 engage with the engagement holes 76 and 76 of the desired head holding member 4. In addition, the air cylinder 341 is timer-controlled by the said control apparatus 215, and keeps the head holding member 4 after position correction until the adhesive agent apply | coated by the temporary fixing device 213 solidifies. Press and hold on the carriage 2.
[403] That is, in the air cylinder 341 which lowered both the coupling arms 331 and 331, the solidification time of the adhesive agent (predetermined) after the position correction of the head holding member 4 and application | coating of adhesive agent (it mentions later in detail) is performed When the time to reach the adhesive strength of) elapses, both the coupling arms (331, 331) are raised to the original position. In addition, in this embodiment, although the coupling pin 343 is made to pressurize with the coil spring 345, the coil spring 345 is abbreviate | omitted and it has a simple structure which integrated the coupling pin 343 and the pin holder 344. You may.
[404] In the above structure, when the both engagement arms 331 and 331 of the arm unit 304 descend | fall and couple to the head holding member 4, the correction (theta) table 303 and the correction X and Y table 302 will drive, The liquid drop ejection head 3 is positioned via the head holding member 4. Then, this positioning state is maintained until the adhesive solidifies. That is, the both holding arms 331 and 331 of the arm unit 304 hold the head holding member 4 toward the carriage 2 in the positioning state, and temporarily fix the device (adhesion) to the head holding member 4. ) 213 will be removed.
[405] Next, the recognition device 214 will be described. As shown in FIG. 24 and FIG. 41, the recognition device 214 includes a camera stand 351 fixed on the correction device stand 301 so as to pass over the front portion of the correction X-Y table 302 and the camera stand 351. It consists of a camera position adjustment unit 352 fixed to the front surface, and a pair of recognition cameras (CCD cameras) 353 and 353 attached to the camera position adjustment unit 352. In this case, the pair of recognition cameras 353 and 353 are fixed to the head unit (alignment mask D) 1 to be recognized.
[406] The camera stand 351 is a horizontally long front plate spanning a pair of left and right pairs of angular pieces 355 and 355 extending forward in an inverted "L" shape and a pair of pieces of angular pieces 355 and 355. Has 356. The pair of recognition cameras 353 and 353 fixed to the front plate 356 via the camera position adjusting unit 352 is slightly higher than the pair of engagement arms 331 and 331 of the head correction device 212. Furthermore, it is arrange | positioned in the position which protrudes slightly forward (refer FIG. 25), and is to prevent interference with the engagement arm 331. As shown in FIG.
[407] 41 to 44, the camera position adjusting unit 352 is attached to the lower end of the Z-axis adjustment plate 358 and Z-axis adjustment plate 358 additionally installed on the front plate 356. The micro stage 359, the left camera holder 360 holding the left recognition camera 353a, and the right camera holder 361 holding the right recognition camera 353b are included. The Z-axis adjustment plate 358 has a pair of guide rails 362 and 362 extending in the vertical direction between the front plate 356 and an adjustment bolt 363 which abuts the upper end of the front plate 356. Have By the forward and reverse rotation of the adjustment bolt 363, the position in the vertical direction of the two recognition cameras 353 and 353 can be adjusted via the Z-axis adjustment plate 358.
[408] The micro stage 359 supports the X axis stage 365 that supports the right recognition camera 353b through the right camera holder 361, and the X axis stage plate 365 that supports the X axis stage 365. It consists of the Y-axis stage 366 fixed to the lower end part. The X-axis stage 365 is configured to be able to move the right recognition camera 353b in the X-axis direction minutely, and to be able to adjust the position in the front-rear direction in the right recognition camera 353b. Similarly, the Y-axis stage 366 is comprised so that adjustment of the position of the left-right direction in the right recognition camera 353b is possible.
[409] On the other hand, the left camera holder 360 is fixed to the lower end of the Z-axis adjustment plate 358. Therefore, the right recognition camera 353b is positioned by the micro stage 359 with respect to the left recognition camera 353a fixedly installed through the left camera holder 360. As described above, since the left and right recognition cameras 353a and 353b simultaneously recognize the two ejection heads 57a and 57a, the microstage beforehand is particularly handled when handling the new liquid drop ejection head 3. The distance between the left and right recognition cameras 353a and 353b, that is, the distance between the fields of view, is adjusted by 359. Reference numeral 367 in the figure denotes a camera cover which integrally covers the camera position adjusting unit 352 and the both recognition cameras 353 and 353.
[410] In the recognition device 214 configured as described above, two reference marks of the carriage 2 (reference pins 12, 2) are formed by the cooperation of the X-axis table 271 of the one recognition camera 353 and the unit moving mechanism 211. 12)) 26 and 26 are position aware. That is, image recognition of one reference pin 12 is performed by one recognition camera 353, and then the carriage 2 is moved in the X-axis direction, and image recognition of the other reference pin 12 is executed. And based on this recognition result, position correction of the carriage (head unit 1) 2 is performed by the unit moving apparatus 211, and position recognition is again performed for confirmation.
[411] In addition, by the pair of recognition cameras 353 and 353, two discharge nozzles 57a and 57a serving as the reference for each liquid drop discharge head 3 are simultaneously recognized. That is, the corresponding liquid drop ejection head 3 moves directly under the pair of recognition cameras 353 and 353, so that the two ejection heads 57a and 57a are simultaneously image-recognized. In this state, the head correcting device 212 faces the head holding member 4 so that the position correction of the liquid drop ejecting head 3 is performed, and the adhesion by the temporary fixing device 213 is performed. In addition, the recognition of each mark 164,165 in the alignment mask D is performed similarly to the above.
[412] Next, the temporary fixing device 213 will be described. As shown in FIG. 22 and FIG. 45, the right side part of the base 204 is provided with the shared stand 219 extended beyond the correction device stand 301, and extending in the front-back direction, and the temporary fixing device 213 is provided. Is placed in front of the shared stand 219. The temporary fixing device 213 includes a rectangular support plate 372 supported on the shared stand 219 by four stays 371, an air table 373 fixed to the lower surface of the rectangular support plate 372, and an air table. The adhesive agent application apparatus 374 fixed to the front-end | tip part of 373 and the adhesive agent tray 375 which faces from the lower side to the adhesive agent application apparatus 374 which moved to the home position are provided. The adhesive tray 375 is fixed to the shared stand 219, and is adapted to receive an adhesive drooping from the adhesive application device 374.
[413] 45 to 49, the air table 373 includes a Y-axis air table 377 attached to the rectangular support plate 372 and a sub-Y-axis air attached to the front end of the Y-axis air table 377. It consists of a table 378, an X-axis air table 379 attached to the tip of the sub-Y-axis air table 378, and a Z-axis air table 380 attached to the tip of the X-axis air table 379. have. The Y-axis air table 377, the sub-Y-axis air table 378, the X-axis air table 379, and the Z-axis air table 380 are all air cylinders connected to the air supply device 203 described above. 377a, 378a, 379a, 380a and sliders 377b, 378b, 379b, and 380b.
[414] The adhesive application device 374 includes a vertical support plate 382 fixed to the Z-axis air table 380, a pair of horizontal support blocks 383 and 383 projecting forward from the lower portion of the vertical support plate 382, and It consists of a pair of dispenser unit 384, 384 attached to each horizontal support block 383, and the dispenser controller 385 supported by said shared stand 219. As shown in FIG. The pair of dispenser units 384 and 384 are arranged to face the pair of coupling arms 331 and 331 or the pair of recognition cameras 353 and 353 from the front side.
[415] Each dispenser unit 384 includes a dispenser 388 equipped with an adhesive injection nozzle 387 at its tip, a cartridge-type syringe 389 for supplying adhesive to the dispenser 388, a dispenser 388 and a syringe. A dispenser holder 390 for holding 389 is provided. The dispenser holder 390 is attached to the front end of the horizontal support block 383 so that angle adjustment is possible, and in this embodiment, it is adjusted so that the adhesive injection nozzle 387 may incline about 45 degrees with respect to horizontal. Each horizontal support block 383 is fixed to the vertical support plate 382 so as to be adjustable in position in the front, rear, left and right directions.
[416] As described above, the adhesive uses the two adhesive injection nozzles 387 and 387 and simultaneously injects (applies) the two adhesive injection holes 77a and 77a on one side of the head holding member 4 to mate. At the same time, after both the adhesive injection nozzles 387 and 387 are moved in the Y-axis direction, they are simultaneously injected (coated) into two other non-adhesive injection holes 77b and 77b to be paired with each other. Therefore, the space | interval dimension of both adhesive injection nozzles 387 and 387 corresponds to the space | interval dimension of mating adhesive injection holes 77a (77b) and 77a (77b) in the head holding member 4. In addition, each adhesive injection nozzle 387 having a predetermined inclination angle is inserted into the adhesive injection hole 77 which is a long hole, and the adhesive is injected by spraying the inner peripheral surface thereof.
[417] By the way, the head correction apparatus 212 presses the head holding member 4 against the carriage 2 as it is in the state where the positioning operation is completed, and keeps it floating. On the other hand, the X-axis air table 379 and the Y-axis air table 377 drive, and the two adhesive injection nozzles 387 and 387 drive the two adhesive injection holes 77a and 77a of the head holding member 4, respectively. ) To the top. Here, the Z-axis air table 380 is driven to insert the two adhesive injection nozzles 387 and 387 into the two adhesive injection holes 77a and 77a simultaneously.
[418] Next, the syringe 389 injects a predetermined amount of adhesive (adjusted to the dispenser controller 385) from the two adhesive injection nozzles 387 and 387. Subsequently, the two adhesive injection nozzles 387 and 387 are raised by the Z-axis air table 380 and the sub-Y-axis air table 378 is driven to drive the two adhesive injection nozzles 387 and 387. It is moved directly above the other two adhesive injection holes 77b and 77b. In this case, since the distance between two pairs of adhesive injection holes 77a (77b) and 77a (77b) in the head holding member 4 is constant, the Y-axis air table 377 is stopped here, Only the sub Y-axis air table 378 is driven.
[419] Next, the adhesive injection nozzles 387 and 387 are raised again, and then the temporary fixing device 213 is stopped to wait for the solidification time of the adhesive. When the solidification time has elapsed, the head correction device 212 releases the engagement with the head holding member 4, thereby completing the temporary fixing (positioning and bonding) operation of any one liquid drop ejecting head 3. . Then, the positioning and adhering operation of the liquid drop ejection head 3 by the coordination of the head correction device 212 and the temporary fixing device 213 is repeated 12 times, thereby temporarily fixing the liquid drop ejection head 3. When completed, the head correction device 212 and the temporary fixing device 213 return to their home positions, respectively.
[420] Here, with reference to FIG. 50, the control apparatus 215 is demonstrated and a series of assembly procedures of the head unit 1 based on this control apparatus 215 are demonstrated. As shown in the block diagram of FIG. 50, the control system in the control apparatus 215 inputs 402 which inputs design position data etc. of the carriage 2 or the liquid droplet discharge head 3 by the operation panel 401. ), A drive unit 403 having various drivers or the like for driving a component device such as the unit moving device 211, a detection unit 404 for performing position recognition by the recognition camera 353, and the assembling device A. The control part 405 which controls all components is provided.
[421] The drive unit 403 includes a moving driver 407 for driving control of each motor of the unit moving device 211, a correction driver 408 for driving control of each motor of the head compensating device 212, and a temporary fixing device 213. ), An air driver 409 for driving control of each air cylinder of the air table 373, and a dispenser controller 385 for controlling the dispenser unit 384 in the temporary fixing device 213.
[422] The control unit 405 has a CPU 411, a ROM 412, a RAM 413, and a P-CON 414, which are connected to each other via a bus 415. The ROM 412 has a control data area for storing various control data in addition to the control program for storing the control program processed by the CPU 411. The RAM 413 has various register groups in addition to the position data area from the outside or the position data area in which the recognition camera 353 stores the master position data and the like obtained from the alignment mask D, and serves as a work area for control processing. Used.
[423] The P-CON 414 supplements the functions of the CPU 411 and is configured with a logic circuit or a timer 416 for handling interface signals with peripheral circuits. Therefore, the P-CON 414 is connected to the operation panel 401 and stores or processes various commands or the like from the input unit 402 in the bus 415 as it is. In addition, the P-CON 414 cooperates with the CPU 411 to output data or control signals output from the CPU 411 and the like to the bus 415 as they are or are processed and output to the driver.
[424] By the above configuration, the CPU 411 inputs various detection signals, various commands, various data, and the like through the P-CON 414 according to the control program in the ROM 412, and enters the RAM 413. Various data are processed and a control signal is output to the driver 403 through the P-CON 414. Thereby, the whole assembly apparatus A, such as the unit movement apparatus 211, the head correction apparatus 212, the temporary fixing apparatus 213, is controlled.
[425] For example, the master position data of the alignment mask D obtained from the recognition camera 353 and the unit position data of the head unit 1 obtained from the recognition camera 353 are stored in the RAM 413 and the ROM 412. The master position data and the unit position data are compared according to the control program therein, and the unit moving device 211 and the head correction device 212 are controlled based on the comparison result.
[426] Here, the assembly method of the head unit 1 by the assembly apparatus A of embodiment is demonstrated in order. In this assembling apparatus A, before the introduction of the head unit 1, the alignment mask D is introduced first. When the alignment mask D is set in the set table 231, the unit moving device 211 drives, so that one carriage reference mark 165 of the alignment mask D faces the one recognition camera 353. The carriage reference mark 165 is position recognized. Next, the X-axis table 271 of the unit moving apparatus 211 drives, the other carriage reference mark 165 is made to face the recognition camera 353, and the other carriage reference mark 165 is position-recognized. .
[427] Next, the unit moving device 211 is driven, and the head reference mark 164 positioned at the end of the alignment mask D is simultaneously faced with the pair of recognition cameras 353 and 353, so that two head reference marks are provided. (164, 164) simultaneously recognizes the position. This is repeated in order, and position recognition of 12 sets of head reference marks 164 corresponding to the twelve liquid drop ejection heads 3 is performed. When the position recognition of the alignment mask D is completed in this way, the alignment mask D is returned to a home position, and the head unit 1 is rearranged in the set table 231.
[428] Here, the head unit 1 is moved in the exact same order as above, and the position movement of the pair of reference pins 12 and 12 of the carriage 2 is first performed, and based on this recognition result, the unit moving device 211 The position correction of the carriage (head unit 1) 2 is performed. Next, by the same procedure as above, the head body (head holding member 4) 50 of the first liquid drop ejecting head 3 faces the pair of engaging arms 331 of the head compensating device 212. Then, the coupling arm 331 is coupled to the head holding member 4. Here, the two discharge nozzles 57a and 57a serving as the positional reference of the head main body 50 are recognized by the pair of recognition cameras 353 and 353.
[429] Next, the head correction device 212 is driven and the liquid drop ejecting head 3 is positioned via the head holding member 4 based on the above recognition result. Then, the temporary fixing device 213 is driven in this positioning state, and the pair of adhesive injection nozzles 387 and 387 are faced to the head holding member 4 to inject adhesive. The injection of the adhesive is performed twice along the movement of the adhesive injection nozzle 387 by the sub Y-axis air cylinder 378 of the temporary fixing device 213. When the injection of the adhesive is completed, it waits for the curing of the adhesive by timer control, and releases the coupling to the head holding member 4 of the head correction device 212.
[430] In this way, the positioning and temporary fixing of the first liquid drop ejection head 3 are completed, and this operation is repeated from the second to the twelfth liquid drop ejection head 3. Finally, the unit moving device 211, the head correction device 212 and the temporary fixing device 213 are returned to their home positions, respectively, and the assembled head unit 1 is removed from the set table 231. Thereafter, the head unit 1 undergoes the cleaning of the liquid drop ejecting head 3, and at the same time, constitutes a component such as the handle 14 or both assemblies 15, 16, and the drawing device B. Is carried.
[431] In addition, in this embodiment, although the liquid droplet discharge head 3 is adhere | attached to the carriage 2 via the head holding member 4, and the adhesive part is made to adhere | attach a metal and a metal, the liquid droplet discharge head 3 ) May be directly bonded to the carriage 2.
[432] By the way, the assembly apparatus of the head unit of this invention and the head unit 1 assembled by this are not only said drawing apparatus B, but the manufacturing method of various flat displays, or the manufacturing method of various electronic devices and optical devices. It is also applicable to the back. Then, the manufacturing method using this head unit 1 is demonstrated taking the manufacturing method of a liquid crystal display device, and the manufacturing method of an organic electroluminescent apparatus as an example.
[433] It is a partial enlarged view of the color filter of a liquid crystal display device. FIG. 51A is a plan view, and FIG. 51B is a sectional view taken along the line BB 'of FIG. 51A. The hatching of each section of the cross section is partially omitted.
[434] As shown in FIG. 51A, the color filter 500 includes pixels (filter elements) 512 arranged in a matrix, and a boundary line between the pixels and the pixels is divided by a partition 513. An ink (filter material) of any one of red (R), green (G), and blue (B) is introduced into each pixel 512. In this example, the arrangement of red, green, and blue is called a mosaic arrangement, but other arrangements such as a stripe arrangement, a delta arrangement, and the like may also be used.
[435] As shown in FIG. 51B, the color filter 500 includes a light transmissive substrate 511 and a light shielding partition 513. The portion where the partition 513 is not formed (removed) constitutes the pixel 512. Each color ink introduced into the pixel 512 constitutes a colored layer 521. The overcoat layer 522 and the electrode layer 523 are formed in the upper surface of the partition 513 and the coloring layer 521.
[436] It is a manufacturing process cross section explaining the manufacturing method of the color filter by embodiment of this invention. The hatching of each section of the cross section is partially omitted.
[437] The surface of the transparent substrate 511 made of an alkali-free glass having a thickness of 0.7 mm, a length of 38 cm, and a width of 30 cm was washed with a washing solution in which 1% by weight of hydrogen peroxide was added to hot concentrated sulfuric acid, followed by rinsing with pure water. Thereafter, air drying is performed to obtain a clean surface. On this surface, a chromium film is formed with a film thickness of 0.2 탆 on average by sputtering to obtain a metal layer 514 '(Fig. 52: S1).
[438] After drying the substrate for 5 minutes at 80 DEG C on a hot plate, a photoresist layer (not shown) is formed on the surface of the metal layer 514 'by spin coating. The mask film which drawn the required matrix pattern shape on the surface of this board | substrate is made to adhere, and it exposes with ultraviolet-ray. Next, this is immersed in an alkaline developer containing potassium hydroxide in a proportion of 8% by weight, the photoresist of the unexposed portion is removed, and the resist layer is patterned. Subsequently, the exposed metal layer is etched away with an etching solution containing hydrochloric acid as a main component. In this manner, a light shielding layer (black matrix) 514 having a predetermined matrix pattern can be obtained (FIG. 52: S2). The film thickness of the light shielding layer 514 is approximately 0.2 mu m. In addition, the width of the light shielding layer 514 is approximately 22 μm.
[439] On this substrate, a negative transparent acrylic photosensitive resin composition 515 'is further coated by spin coating (FIG. 52: S3). After prebaking this at 100 degreeC for 20 minutes, ultraviolet-ray exposure is performed using the mask film which drawn the predetermined | prescribed matrix pattern shape. The resin in the unexposed portion is also developed with an alkaline developer, rinsed with pure water, and then spin dried. After-baking as a final drying is performed for 30 minutes at 200 degreeC, and the resin part is hardened sufficiently, and the bank layer 515 is formed, and the partition 513 which consists of the light shielding layer 514 and the bank layer 515 is Formed (FIG. 52: S4). The film thickness of this bank layer 515 is 2.7 탆 on average. In addition, the width of the bank layer 515 is approximately 14 mu m.
[440] In order to improve ink wettability of the colored layer forming region (particularly, the exposed surface of the glass substrate 511) partitioned by the obtained light shielding layer 514 and the bank layer 515, dry edging, that is, plasma treatment Is done. Specifically, a high voltage is applied to a mixed gas in which 20% of oxygen is added to helium, formed as an etching spot in a plasma atmosphere, and the substrate is etched through the etching spot below.
[441] Next, each of the inks R (red), G (green), and B (blue) is introduced into the pixel 512 formed by the partition 513 by the inkjet method (Fig. 52: S5). As the liquid drop ejecting head (ink jet head), a precision head to which the piezoelectric piezoelectric effect is applied is used, and 10 drops of fine ink are selectively blown for each colored layer formation region. The driving frequency is set at 14.4 Hz, that is, the ejection interval of each ink droplet is 69.5 Hz. The distance between the head and the target is set to 0.3 mm. In order to prevent the emergence of flying velocity from the head to the target colored layer forming region, flight curves, and fragmented vagus droplets called satellites, it is necessary to drive the piezo elements of the head as well as the physical properties of the ink. Waveforms (including voltages) are important. Therefore, by pre-conditioning the waveform is programmed, the ink droplets are applied in three colors of red, green and blue at the same time to apply the ink in a predetermined color pattern.
[442] As an ink (filter material), for example, after dispersing an inorganic pigment in a polyurethane resin oligomer, cyclohexanone and butyl acetate are added as a low boiling point solvent, and butyl carbitol acetate is added as a high boiling point solvent. 0.01 weight% of ionic surfactant is further added as a dispersing agent, and the thing made into the viscosity 6-8 centipoise is used.
[443] Next, the applied ink is dried. First, the ink layer 516 is left for 3 hours in a natural atmosphere to be set, followed by heating for 40 minutes on an 80 ° C. hot plate, and finally heating at 200 ° C. for 30 minutes in an oven to cure the ink layer 516. The colored layer 521 is obtained (FIG. 52: S6).
[444] The transparent acrylic resin paint is spin coated on the substrate to form an overcoat layer 522 having a smooth surface. Further, an electrode layer 523 made of indium tin oxide (ITO) is formed on the upper surface in a required pattern to form a color filter 500 (FIG. 52: S7).
[445] 53 is a cross-sectional view of a color liquid crystal display device which is an example of an electro-optical device (flat display) manufactured by the manufacturing method of the present invention. The hatching of each section of the cross section is partially omitted.
[446] This color liquid crystal display device 550 is manufactured by combining the color filter 500 and the opposing board | substrate 566, and sealing the liquid crystal composition 565 between them. On the inner side of one substrate 566 of the liquid crystal display device 550, a TFT (thin film transistor) element (not shown) and the pixel electrode 563 are formed in a matrix. As the other substrate, the color filter 500 is provided so that the red, green, and blue colored layers 521 are arranged at positions facing the pixel electrodes 563.
[447] Alignment films 561 and 564 are formed on respective surfaces of the substrate 566 and the color filter 500 that face each other. These alignment films 561 and 564 are subjected to rubbing, and the liquid crystal molecules can be arranged in a predetermined direction. In addition, polarizing plates 562 and 567 are adhered to the outer surfaces of the substrate 566 and the color filter 500, respectively. As the backlight, a combination of a fluorescent lamp (not shown) and a scattering plate is generally used, and the liquid crystal composition 565 is displayed by functioning as a light shutter for changing the transmittance of backlight light.
[448] In addition, an electro-optical device is not limited to said color liquid crystal display device in this invention, For example, the small television using a thin-shaped CRT, a liquid crystal shutter, etc., an EL display device, a plasma display, a CRT display Various electro-optic means such as FED (Field Emission Display) panel can be used.
[449] Next, with reference to FIGS. 52-66, the organic EL (display apparatus) of the organic electroluminescent apparatus and its manufacturing method are demonstrated.
[450] (1) First embodiment
[451] 54 to 58 show a first embodiment of the present invention, which is applied to an active matrix display device using an EL display element. More specifically, an example of applying a light emitting material as an optical material is shown using a scanning line, a signal line, and a common feed line as wiring.
[452] FIG. 54 is a circuit diagram showing a part of the display device 600 according to the present embodiment, in which the display device 600 intersects a plurality of scan lines 631 and these scan lines 631 on a transparent display substrate. And a plurality of signal lines 632 extending in parallel to each other and a plurality of common feed lines 633 extending in parallel to these signal lines 632, respectively, and at each intersection of the scan line 631 and the signal line 632. The pixel region 600A is provided.
[453] As for the signal line 632, a data side driving circuit 601 including a shift register, a level shifter, a video line, and an analog switch is provided.
[454] In the scanning line 631, a scanning side driver circuit 602 including a shift register and a level shifter is provided. In each of the pixel regions 600A, a switching thin film transistor 643 in which a scan signal is supplied to the gate electrode through the scanning line 631 and an image supplied from the signal line 632 through the switching thin film transistor 643. A common power supply line 633 through a holding capacitor cap for holding a signal, a current thin film transistor 644 to which an image signal held by the holding capacitor cap is supplied to a gate electrode, and an current thin film transistor 644. ) And a light emitting element 641 sandwiched between the pixel electrode 642 and the reflective electrode 652 when a driving current flows in from the common feed line 633. have.
[455] In such a configuration, when the scanning line 631 is driven and the switching thin film transistor 643 is turned on, the potential of the signal line 632 at that time is held at the holding capacitor cap, and the state of the holding capacitor cap is maintained. Accordingly, the on / off state of the current thin film transistor 644 is determined. Since the current flows from the common feed line 633 to the pixel electrode 642 through the channel of the current thin film transistor 644 and the current flows through the light emitting element 641 to the reflective electrode 652, the light emitting element 641. ) Emits light according to the amount of current flowing therethrough.
[456] Here, the planar structure of each pixel region 600A has four transition signal lines 632 of the pixel electrode 642 having a rectangular planar shape, as shown in FIG. 55, which is an enlarged plan view in a state where a reflective electrode or a light emitting element is removed. ), A common feed line 633, a scan line 631, and another pixel electrode scan line (not shown).
[457] 56 through 58 are cross-sectional views sequentially illustrating a manufacturing process of the pixel region 600A, and correspond to the cross section along the line A-A in FIG. 55. Hereinafter, the manufacturing process of the pixel area 600A is demonstrated with reference to FIGS. 56-58.
[458] First, as shown in FIG. 57A, the transparent display substrate 621 has a thickness of about 2000 to 5000 kPa by the plasma CVD method using TEOS (tetraethoxysilane), oxygen gas, or the like as the raw material gas as necessary. A base protective film (not shown) made of a silicon oxide film is formed. Subsequently, the temperature of the display substrate 621 is set to about 350 ° C, and a semiconductor film 700 made of an amorphous silicon film having a thickness of about 300 to 700 ° C is formed on the surface of the underlying protective film by plasma CVD. Next, a crystallization process such as laser annealing or solid phase growth is performed on the semiconductor film 700 made of the amorphous silicon film, and the semiconductor film 700 is crystallized into a polysilicon film. In the laser annealing method, for example, as an excimer laser, the line beam whose long dimension of a beam is 400 mm is used, The output intensity is 20mJ / cm <2>, for example. For the line beam, the line beam is scanned so that 90% of the laser intensity peak values in the shorter dimension direction overlap each region.
[459] Subsequently, as shown in FIG. 56B, the semiconductor film 700 is patterned to form an island-shaped semiconductor film 710, and the surface of the plasma is made of TEOS (tetraethoxysilane) or oxygen gas as a source gas. By the CVD method, a gate insulating film 720 made of a silicon oxide film or a nitride film having a thickness of about 600 to 1500 mW is formed. The semiconductor film 710 is a channel region and a source / drain region of the current thin film transistor 644, but the semiconductor film is a channel region and a source / drain region of the switching thin film transistor 643 at different cross-sectional positions. Also formed. That is, in the manufacturing process shown in FIGS. 56 to 58, although the two types of transistors 643 and 644 are manufactured at the same time, they are manufactured in the same order. Therefore, in the following description, only the current thin film transistor 644 is used for the transistor. The description will be omitted of the switching thin film transistor 643.
[460] Subsequently, as shown in Fig. 56C, after forming a conductive film made of a metal film such as aluminum, tantalum, molybdenum, titanium, tungsten or the like by the sputtering method, the gate electrode 644A is formed.
[461] In this state, high-temperature phosphorus ions are implanted to form source and drain regions 644a and 644b in the silicon thin film 710 in a self-aligned manner with respect to the gate electrode 644A. In addition, the portion where impurities are not introduced becomes the channel region 644c.
[462] 56D, after forming the interlayer insulation film 730, contact holes 731 and 732 are formed, and the relay electrodes 733 and 734 are embedded in these contact holes 731 and 732. Next, as shown in FIG.
[463] 56E, a signal line 632, a common feed line 633, and a scanning line (not shown in FIG. 56) are formed over the interlayer insulating film 730. As shown in FIG. At this time, each wiring of the signal line 632, the common feed line 633, and the scanning line is not limited to the thickness required as the wiring, and is formed sufficiently thick. Specifically, each wiring is formed to a thickness of about 1 to 2 μm. Here, the relay electrode 734 and the respective wirings may be formed in the same process. At this time, the relay electrode 733 is formed of an ITO film described later.
[464] An interlayer insulating film 740 is formed to cover the upper surface of each wiring, a contact hole 741 is formed at a position corresponding to the relay electrode 733, and an ITO film is formed so as to be embedded in the contact hole 741 as well. The ITO film is patterned to form a pixel electrode 642 electrically connected to the source / drain region 644a at a predetermined position surrounded by the signal line 632, the common feed line 633, and the scan line.
[465] In FIG. 56E, the portion narrowed by the signal line 632 and the common feed line 633 corresponds to a predetermined position where the optical material is selectively disposed. A step 611 is formed between the predetermined position and the periphery thereof by the signal line 632 or the common feed line 633. Specifically, a concave step 611 is formed in which the predetermined position is lower than its surroundings.
[466] Subsequently, as shown in FIG. 57A, in the state where the upper surface of the display substrate 621 is faced upward, the liquid phase for forming the hole injection layer that contacts the lower layer portion of the light emitting element 641 by the inkjet head method. (612A) of the optical material (precursor) of (the solution phase melt | dissolved in the solvent) is discharged, and this is selectively apply | coated in the area | region (predetermined position) enclosed by the step | step 611.
[467] As a material for forming a hole injection layer, polyphenylene vinylene whose polymer precursor is polytetrahydrothiophenylphenylene, 1, 1-bis (4-N, N- dithrylaminophenyl) cyclohexane, tris (8 -Hydroxyquinolinol) aluminum and the like.
[468] At this time, since the liquid precursor 612A has high fluidity, the liquid precursor 612A tries to diffuse in the horizontal direction, but since the step 611 is formed so as to surround the applied position, the liquid precursor 612A has a very high application amount per one time. If the amount is not large, the liquid precursor 612A is prevented from diffusing beyond the step 611 to the outside of the predetermined position.
[469] 57B, the solvent of the liquid precursor 612A is evaporated by heating or light irradiation to form a solid thin hole injection layer 641a on the pixel electrode 642. Here, due to the concentration of the liquid precursor 612A, only a thin hole injection layer 641a is formed. Therefore, in the case where a thicker hole injection layer 641a is required, the steps of FIGS. 57A and 57B are repeatedly performed as necessary, and as shown in FIG. 57C, a hole injection layer 641A having a sufficient thickness is formed. do.
[470] Subsequently, as shown in FIG. 58A, in the state where the upper surface of the display substrate 621 is faced upward, a liquid phase (dissolved in a solvent) for forming an organic semiconductor film in contact with the upper layer portion of the light emitting element 641 by an inkjet head method. The optical material (organic fluorescent material) 612B of the prepared solution phase is discharged, and this is selectively applied in an area (predetermined position) surrounded by the step 611.
[471] Examples of the organic fluorescent material include cyanopolyphenylenevinylene, polyphenylenevinylene, polyalkylphenylene, 2, 3, 6, 7-tetrahydro-11-oxo-1H.5H.11H (1) benzopyrano. [6, 7, 8-ij] -quinolizine-10-carboxylic acid, 1, 1-bis (4-N, N-dithrylaminophenyl) cyclohexane, 2-13.4'-dihydroxyphenyl ) -3,5,7-trihydroxy-1-benzopyririum perchlorate, tris (8-hydroxyquinolinol) aluminum, 2, 3, 6, 7-tetrahydro-9-methyl-11-oxo- 1H.5H.11H (1) benzopyrano [6, 7, 8-ij] -quinolizine, aromatic diamine derivative (TDP), oxydiazole dimer (OXD), oxydiazole derivative (PBD), dityl Allylene derivatives (DSA), quinolinol-based metal complexes, berrilium-benzoquinolinol complexes (Bebq), triphenylamine derivatives (MTDATA), distyryl derivatives, pyrazoline dimers, rubrene, quinacridones, triazoles Derivatives, polyphenylenes, polyalkylfluorenes, polyalkylthiophenes, azomethine zinc complexes, polypyrines There may be mentioned soft complexes, benzoxazole zinc complex, phenanthroline europium complex and the like.
[472] At this time, since the liquid organic fluorescent material 612B has high fluidity, the liquid organic fluorescent material 612B also tries to diffuse in the horizontal direction, but because the step 611 is formed to surround the applied position, one of the liquid organic fluorescent material 612B is used. If the application amount per time is not extremely large, the liquid organic fluorescent material 612B is prevented from spreading beyond the step 611 to the outside of the predetermined position.
[473] 58B, the solvent of the liquid organic fluorescent material 612B is evaporated by heating or light irradiation, and the solid thin organic semiconductor film 641b is formed on the hole injection layer 641A. Here, the thickness is also caused by the concentration of the liquid organic fluorescent material 612B, but only a thin organic semiconductor film 641b is formed. Therefore, when a thicker organic semiconductor film 641b is required, the steps of FIGS. 58A and 58B are repeatedly performed as necessary, and as shown in FIG. 58C, an organic semiconductor film 641B having a sufficient thickness is formed. do. The light emitting element 641 is formed of the hole injection layer 641a and the organic semiconductor film 641B. Finally, as shown in FIG. 58D, the reflective electrode 652 is formed over the entire surface of the display substrate 621 or in a stripe shape.
[474] As described above, in the present embodiment, the wirings such as the signal line 632 and the common wiring 633 are formed so as to surround the treatment position where the light emitting element 641 is disposed from all directions, and the wirings are formed thicker than usual. Since the step 611 is formed and the liquid precursor 612A or the liquid organic fluorescent material 612B is selectively applied, there is an advantage that the patterning accuracy of the light emitting element 641 is high.
[475] If the step 611 is formed, the reflective electrode 652 is formed on a relatively large uneven surface, but if the reflective electrode 652 is thickened to some extent, defects such as disconnection may occur. Becomes quite small.
[476] In addition, since the step 611 is formed using the wiring such as the signal line 632 or the common wiring 633, a new process does not increase in particular and does not cause a significant complexity of the manufacturing process.
[477] In addition, the optical material which forms the upper layer part of the light emitting element 641 is not limited to the organic fluorescent material 612B, An inorganic fluorescent material can also be used.
[478] In addition, each of the transistors 643 and 644 as the switching element is preferably formed of polycrystalline silicon formed by a low temperature process of 600 ° C. or lower, thereby reducing the cost and high mobility by using a glass substrate. The high performance by this can be compatible. In addition, the switching element may be formed of amorphous silicon or polycrystalline silicon formed by a high temperature process of 600 ° C. or higher.
[479] The transistors may be provided in addition to the switching thin film transistors 643 and the current thin film transistor 644, or may be configured to be driven by one transistor.
[480] The step 611 may be formed by the first bus wiring of the passive matrix display element, the scanning line 631 of the active matrix display element, and the light shielding layer.
[481] As the light emitting element 641, the light emission efficiency (hole injection rate) slightly decreases, but the hole injection layer 641A may be omitted. Instead of the hole injection layer 641A, an electron injection layer may be formed between the organic semiconductor film 641B and the reflective electrode 652, or both of the hole injection layer and the electron injection layer may be formed.
[482] In addition, in the above embodiment, the case where the entire light emitting element 641 is selectively arranged has been described with the color display in mind, for example, in the case of the monochrome display display device 600, FIG. 59. As shown in FIG. 1, the organic semiconductor film 641B may be uniformly formed on the entire surface of the display substrate 621. However, even in this case, since the hole injection layer 641A must be selectively disposed at each predetermined position in order to prevent crosstalk, application using the step 611 is quite effective.
[483] (2) 2nd Embodiment
[484] Fig. 60 is a diagram showing a second embodiment of the present invention, which is applied to a passive matrix display device using an EL display element.
[485] 60A is a plan view showing the arrangement relationship between the plurality of first bus lines 750 and the plurality of second bus lines 760 arranged in a direction perpendicular to the plurality of first bus lines 750, and FIG. 60B is a cross-sectional view taken along line BB of FIG. 60A. to be.
[486] In addition, the same code | symbol is attached | subjected to the same structure as the said 1st Embodiment, and the overlapping description is abbreviate | omitted. In addition, since a detailed manufacturing process etc. are also the same as that of the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[487] In other words, in the present embodiment, for example, an insulating film 7700 such as SiO ₂ is disposed so as to surround a predetermined position where the light emitting element 641 is arranged. A step 611 is formed therebetween.
[488] Even in such a configuration, as in the first embodiment, when selectively applying the liquid precursor 612A or the liquid organic fluorescent material 612B, they can be prevented from flowing around and high-precision patterning can be performed. And so on.
[489] (3) Third Embodiment
[490] Fig. 61 shows a third embodiment of the present invention, which is also applied to an active matrix display device using an EL display element similarly to the first embodiment. More specifically, by forming the step 611 using the pixel electrode 642, high precision patterning can be performed.
[491] In addition, the same code | symbol is attached | subjected to the structure similar to the said embodiment. 61 is sectional drawing which shows the middle of a manufacturing process, Since the front and back is substantially the same as the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[492] That is, in this embodiment, the pixel electrode 642 is formed thicker than usual, and thereby the step 611 is formed between the surroundings. That is, in this embodiment, the step | step of the convex form in which the pixel electrode 642 to which an optical material is apply | coated later becomes higher than the periphery is formed.
[493] As in the first embodiment, an optical material (precursor) in a liquid phase (solution solution dissolved in a solvent) for forming a hole injection layer in contact with the lower layer portion of the light emitting element 641 by the inkjet head method ( 612A is discharged and applied to the upper surface of the pixel electrode 642.
[494] Unlike the case of the first embodiment, however, the liquid crystal precursor is in a state where the display substrate 621 is upside down, that is, the top surface of the pixel electrode 642 to which the liquid precursor 612A is applied is faced downward. (612A) is applied.
[495] Thus, the liquid precursor 612A accumulates on the upper surface of the pixel electrode 642 by gravity and surface tension, and does not diffuse around it. Therefore, when it solidifies by heating or light irradiation etc., the thin hole injection layer similar to FIG. 57B can be formed, and if this is repeated, a hole injection layer will be formed. An organic semiconductor film is also formed by the same method.
[496] Thus, in this embodiment, the liquid optical material is apply | coated using the step 611 of convex form, and the patterning precision of a light emitting element can be improved.
[497] In addition, the amount of liquid optical material accumulated on the upper surface of the pixel electrode 642 may be adjusted by using inertial forces such as centrifugal force.
[498] (4) Fourth Embodiment
[499] Fig. 62 shows a fourth embodiment of the present invention, which is also applied to an active matrix display device using an EL display element similarly to the first embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to the said embodiment. 62 is sectional drawing which shows the middle of a manufacturing process, Since the front and back are substantially the same as the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[500] That is, in this embodiment, first, the reflective electrode 652 is formed on the display substrate 621, and then the insulating film 770 is surrounded on the reflective electrode 652 so as to surround a predetermined position where the light emitting element 641 is later disposed. And a concave step 611 is formed in which the predetermined position is lower than its periphery.
[501] As in the first embodiment, the light emitting element 641 is formed by selectively applying the liquid optical material by the inkjet method in the region surrounded by the step 611.
[502] On the other hand, the scan line 631, the signal line 632, the pixel electrode 642, the switching thin film transistor 643, the current thin film transistor 644, and the insulating film 740 on the peeling substrate 622 through the peeling layer 651. To form.
[503] Finally, the structure peeled from the peeling layer 622 on the peeling substrate 622 on the display substrate 621 is transferred.
[504] Thus, also in this embodiment, since the liquid optical material was apply | coated using the step | step 611, high precision patterning can be performed. In addition, in this embodiment, the damage by the subsequent process to the base material, such as the light emitting element 641, or the scanning line 631, the signal line 632, the pixel electrode 642, the switching thin film transistor 643, the current It is possible to reduce damage caused by application of the optical material to the thin film transistor 644 or the insulating film 740.
[505] Although the present embodiment has been described as an active matrix display element, it may be a passive matrix display element.
[506] (5) Fifth Embodiment
[507] Fig. 63 is a diagram showing a fifth embodiment of the present invention, which is also applied to an active matrix display device using an EL display element similarly to the first embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to the said embodiment. 63 is sectional drawing which shows the middle of a manufacturing process, Since the front and back are substantially the same as the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[508] That is, in this embodiment, the step 611 of concave shape is formed using the interlayer insulation film 740, and thereby, the same effect as the said 1st Embodiment is acquired.
[509] In addition, since the step 611 is formed using the interlayer insulating film 740, a new process does not increase in particular, which does not cause significant complexity of the manufacturing process.
[510] (6) 6th Embodiment
[511] Fig. 64 shows a sixth embodiment of the present invention, which is also applied to an active matrix display device using an EL display element similarly to the first embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to the said embodiment. In addition, FIG. 64 is sectional drawing which shows the middle of a manufacturing process, Since the front and back is substantially the same as the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[512] That is, in the present embodiment, the patterning accuracy is not improved by using a step, but "the hydrophilicity of the predetermined position to which the liquid-phase optical material is applied is made stronger than the hydrophilicity around it, so that the applied liquid optical material does not diffuse to the surroundings. It is to avoid.
[513] Specifically, as shown in FIG. 64, after the interlayer insulating film 740 is formed, an amorphous silicon layer 653 is formed on the upper surface thereof. Since the amorphous silicon layer 653 has a stronger water repellency than the ITO forming the pixel electrode 642, the hydrophilicity and hydrophilicity of the surface of the pixel electrode 642 is stronger than that of the surroundings. Distribution is formed.
[514] In the same manner as in the first embodiment, the light emitting element 641 is formed by selectively applying the liquid optical material toward the upper surface of the pixel electrode 642 by an inkjet method, and finally, the reflective electrode is formed.
[515] As described above, even in the case of the present embodiment, since the liquid optical material is applied after forming a desired water repellency and lyophilic distribution, the accuracy of patterning can be improved.
[516] In addition, the present embodiment can also be applied to a passive matrix display element.
[517] In addition, the step of transferring the structure formed on the peeling substrate 621 through the peeling layer 651 to the display substrate 621 may be included.
[518] In addition, in this embodiment, although the desired water repellency and hydrophilic distribution are formed by the amorphous silicon layer 653, distribution of water repellency and hydrophilicity is performed by insulating materials, such as a metal, anodizing film, polyimide, or silicon oxide, and other materials. It may be formed. In the case of the passive matrix display element, the first bus wiring and the active matrix display element may be formed by the scan line 631, the signal line 632, the pixel electrode 642, the insulating film 740, or the light shielding layer. It may be.
[519] In addition, in this embodiment, although the liquid optical material was demonstrated on the premise that it is aqueous solution, the liquid optical material which used the solution of another liquid may also be sufficient, and in that case, it is good to make it liquid-repellent and lyophilic with respect to the solution. .
[520] (7) Seventh Embodiment
[521] In the seventh embodiment of the present invention, since the cross-sectional structure is the same as that in Fig. 63 used in the fifth embodiment, it will be described using this.
[522] That is, in the present embodiment, the interlayer insulating film 740 is formed of SiO ₂ , the surface is irradiated with ultraviolet rays, after which the surface of the pixel electrode 642 is exposed, and the liquid optical material is selectively applied. .
[523] In this manufacturing process, not only the step 611 is formed, but also the liquid-repellent strong distribution is formed along the surface of the interlayer insulating film 740, so that the applied liquid optical material has a step 611 and the interlayer insulating film 740. Due to the action of both liquid repellents, it is easily laminated at a predetermined position. That is, since both the effects of the fifth embodiment and the sixth embodiment are exhibited, the patterning accuracy of the light emitting element 641 can be further improved.
[524] In addition, the timing of irradiating ultraviolet rays may be either before or after exposing the surface of the pixel electrode 642 and may be appropriately selected depending on the material for forming the interlayer insulating film 740 or the material for forming the pixel electrode 642. . In addition, when ultraviolet rays are exposed when the surface of the pixel electrode 642 is exposed, since the liquid repellency of the inner wall surface of the step 611 does not become strong, the liquid optical material is accumulated in the area surrounded by the step 611. It is advantageous to. On the contrary, in the case of irradiating ultraviolet rays after exposing the surface of the pixel electrode 642, it is necessary to irradiate ultraviolet rays vertically so that the liquid repellency of the inner wall surface of the step 611 is not strong, but the surface of the pixel electrode 642 Since the ultraviolet ray is irradiated after the etching step at the time of exposing the film, the liquid repellency may not be weakened by the etching step.
[525] In addition, as a material for forming the interlayer insulating film 740, for example, a photoresist may be used, or a polyimide may be used, in which case there is an advantage that a film can be formed by spin coating. .
[526] And depending on the material for forming the interlayer insulating film 740, the liquid repellency may be enhanced by irradiating, for example, plasma such as O ₂ , CF ₃ , Ar, instead of irradiating with ultraviolet rays.
[527] (8) 8th Embodiment
[528] Fig. 65 shows an eighth embodiment of the present invention, which is applied to an active matrix display device using an EL display element similarly to the first embodiment. In addition, the same code | symbol is attached | subjected to the structure similar to the said embodiment. 65 is sectional drawing which shows the middle of a manufacturing process, Since the front and back is substantially the same as the said 1st Embodiment, the illustration and description are abbreviate | omitted.
[529] That is, in the present embodiment, the patterning accuracy is not improved by using a step, distribution of liquid repellency, lyophilic, etc., but the patterning precision is improved by using attraction force and repulsive force due to dislocations.
[530] That is, as shown in FIG. 65, by driving the signal line 632 or the common feed line 633, and by appropriately turning on / off a transistor (not shown), the pixel electrode 642 is at a negative potential, thereby causing the interlayer insulating film ( 740 forms a potential distribution that becomes a positive potential. Then, the positively charged liquid optical material 612 is selectively applied to a predetermined position by the inkjet method.
[531] As described above, in the case of the present embodiment, the liquid crystal optical material is formed by forming a desired dislocation distribution on the display substrate 621 and using attraction force and repulsive force between the dislocation distribution and the positively charged liquid optical material 612. Since it is apply | coated selectively, the precision of patterning can be improved.
[532] In particular, in the present embodiment, since the liquid optical material 612 is charged, the effect of improving the accuracy of patterning by using not only spontaneous polarization but also charge charge becomes higher.
[533] In the present embodiment, a case where the present invention is applied to an active matrix display element is shown, but it is also applicable to a passive matrix display element.
[534] In addition, the step of transferring the structure formed on the peeling substrate 621 through the peeling layer 651 to the display substrate 621 may be included.
[535] In the present embodiment, the desired potential distribution sequentially applies potentials to the scan lines 631, applies potentials to the signal lines 632 and the common lines 633, and applies the switching thin film transistors to the pixel electrodes 642. 643 and current thin film transistor 644 to form a potential. An increase in the process can be suppressed by forming the potential distribution by the scan line 631, the signal line 632, the common line 633, and the pixel electrode 642. In the case of the passive matrix display element, the potential distribution can be formed by the first bus wiring and the light shielding layer.
[536] In addition, in this embodiment, although the potential is supplied to both the pixel electrode 642 and the interlayer insulation film 740 surrounding it, it is not limited to this, For example, as shown in FIG. 66, a pixel electrode Instead of supplying a potential to the 642, a positive potential may be supplied only to the interlayer insulating film 740, and the liquid optical material 612 may be positively charged and then applied. In this case, since the liquid optical material 612 can be reliably maintained in a positively charged state even after being applied, the liquid optical material 612 is repelled by the repulsive force with the surrounding interlayer insulating film 740. It is possible to more reliably prevent flow to the surroundings.
[537] Similarly, the head unit of this embodiment can be applied to a manufacturing method of an electron emitting device, a manufacturing method of a PDP device, a manufacturing method of an electrophoretic display device, and the like.
[538] In the method of manufacturing an electron emitting device, fluorescent materials of various colors R, G, and B are introduced into a plurality of liquid drop discharge heads, and main and sub-scans of the plurality of liquid drop discharge heads are performed through a head unit, and a fluorescent material is selectively selected. It discharges and forms many fluorescent substance on an electrode. Also, the electron emitting device is a higher concept that includes a field emission display (FED).
[539] In the manufacturing method of the PDP apparatus, R, G, and B fluorescent materials of various colors are introduced into the plurality of liquid drop discharge heads, the main and sub scans of the plurality of liquid drop discharge heads are performed through the head unit, and the fluorescent material is selectively discharged. Thus, phosphors are formed in the plurality of recesses on the rear substrate, respectively.
[540] In the method of manufacturing an electrophoretic display device, various electrophoretic materials are introduced into a plurality of liquid drop ejection heads, main injection and sub-injection of a plurality of liquid drop discharge heads are performed through a head unit, and ink materials are selectively discharged. A plurality of concave portions on the electrodes are formed respectively. Moreover, it is preferable that the electrophoretic body which consists of charged particle and dye is enclosed in the microcapsule.
[541] In addition, the head unit of this embodiment is applicable also to a spacer formation method, a metal wiring formation method, a lens formation method, a resist formation method, a light-diffusion body formation method, etc.
[542] The spacer forming method is to form a spacer in the form of a plurality of particles so as to form a small cell gap between two substrates, introduce a particle material constituting the spacer into the plurality of liquid drop discharge heads, The liquid drop ejection head is subjected to the main scan and the sub-scan, and the particulate material is selectively ejected to form a spacer on at least one substrate. For example, it is useful when forming a cell gap between two substrates in the liquid crystal display or the electrophoretic display, and can be applied to a semiconductor manufacturing technology requiring such a small gap.
[543] In the metal wiring forming method, a liquid metal material is introduced into the plurality of liquid drop ejection heads, the main liquid injection and the sub-injection of the plurality of liquid drop ejection heads are carried out through the head unit, and the liquid metal material is selectively discharged to form a metal wiring on the substrate. To form. For example, it is applicable to the metal wiring which connects the driver and each electrode in the said liquid crystal display device, or the metal wiring which connects each electrode etc. with TFT in the said organic electroluminescent apparatus. In addition to these flat displays, the present invention can also be applied to general semiconductor manufacturing techniques.
[544] In the lens forming method, the lens material is introduced into the plurality of liquid drop ejection heads, the main liquid injection and the sub-injection of the plurality of liquid drop ejection heads are performed through the head unit, and the lens material is selectively ejected to form a plurality of micro lenses on the transparent substrate. To form. For example, it is applicable as a device for beam convergence in the said FED apparatus. It can also be applied to various optical devices.
[545] In the resist formation method, a resist material is introduced into a plurality of liquid drop ejection heads, main injection and sub-injection of a plurality of liquid drop ejection heads are performed through a head unit, and the resist material is selectively ejected to form an arbitrary shape photoresist on a substrate. To form. For example, in the photolithography method which forms not only the bank formation in the said various display devices but also the semiconductor manufacturing technique, it is widely applicable to application | coating of a photoresist.
[546] In the light diffuser forming method, a light diffuser forming method for forming a plurality of light diffusers on a substrate by using a head unit assembled by a head unit assembling apparatus, comprising: applying a light diffusing material to a plurality of liquid drop discharge heads. It introduces, a plurality of liquid drop discharge heads are main-scanned and sub-scanned through a head unit, and a light-diffusion material is selectively discharged, and many light-diffusers are formed. This case can also be applied to various optical devices.
[547] As described above, according to the assembling apparatus and assembling method of the head unit of the present invention, a series of operations from the position recognition of the carriage and each liquid drop ejecting head to the positioning fixing of the carriage of each liquid drop ejecting head to a single device are performed. In this case, the head unit comprising a plurality of liquid drop ejection heads in the carriage with high positioning accuracy can be stably obtained. Therefore, productivity and reliability of the head unit can be improved.
[548] In addition, according to the positioning apparatus and positioning method of the liquid drop ejection head of the present invention, since the positioning operation (position correcting operation) is performed based on the result of image recognition, the liquid drop ejection head is mounted on the carriage. Fast and simple positioning with high precision.
[549] In addition, according to the fixing device and the fixing method of the liquid drop ejecting head of the present invention, since the fixing operation (fixing operation) can be performed without applying an external force, the displacement at the time of fixing the liquid drop ejecting head to the carriage can be reliably You can prevent it.
[550] On the other hand, according to the manufacturing method of the liquid crystal display device of this invention, the manufacturing method of an organic electroluminescent apparatus, the manufacturing method of an electron emitting device, the manufacturing method of a PDP apparatus, and the manufacturing method of an electrophoretic display apparatus, the filter material or light emission in each apparatus is shown. Since the liquid drop ejection head suitable for a material or the like can be used, manufacturing efficiency can be improved.
[551] Moreover, according to the manufacturing method of the color filter of this invention, the manufacturing method of an organic EL, the spacer formation method, the metal wiring formation method, the lens formation method, the resist formation method, and the light-diffuser formation method, in each electronic device or each optical device, Since the liquid drop ejection head suitable for the filter material, the light emitting material and the like can be used, manufacturing efficiency can be improved.

权利要求:
Claims (57)
[1" claim-type="Currently amended] A head which faces a plurality of liquid drop ejection heads each held by a head holding member to a head unit temporarily mounted in a single carriage via the head holding member, and fixes each of the liquid drop ejecting heads in a state positioned on the carriage; As the assembly device of the unit,
Recognition means for image recognition of the position of the carriage and the position of each liquid drop ejecting head, respectively;
Moving means for holding the carriage and moving the carriage in the X, Y, and θ directions;
A correction means coupled to the head holding member to move the head holding member in a small direction in the X, Y, and θ directions;
Fixing means for fixing the head holding member to a carriage;
And control means for controlling said recognition means, said moving means, said correcting means and said fixing means,
The control means drives the moving means based on the recognition result of the recognition means to position the carriage, and then drives the correction means to drive the respective liquid drop ejecting heads through the head holding members with respect to the carriage. And positioning the fixing means to fix the liquid drop ejection head to the carriage through the head holding members.
[2" claim-type="Currently amended] The method of claim 1,
An alignment mask formed by patterning the position of the carriage and the position of each of the liquid drop ejecting heads mounted on the carriage;
The control means controls the moving means, the correcting means and the fixing means based on the alignment mask held by the moving means and the master position data and unit position data obtained from the head unit, respectively, via the recognition means. Assembly apparatus of the head unit, characterized in that.
[3" claim-type="Currently amended] The method according to claim 1 or 2,
Recognition of the position of the carriage is performed by the recognition means respectively recognizing two reference marks provided to the carriage apart from each other.
The recognizing means has a recognizing camera for accommodating the two reference marks in the field of view by relative movement of one of the X and Y axis directions relative to the carriage, respectively. .
[4" claim-type="Currently amended] The method according to claim 1 or 2,
Recognition of the positions of the respective liquid drop ejection heads is performed by the recognition means respectively recognizing two separated nozzles in the nozzle row formed on the nozzle formation surface of the liquid drop ejection head,
The recognizing means has two recognizing cameras for accommodating each of the two nozzles in a field of view at the same time.
[5" claim-type="Currently amended] The method according to claim 1 or 2,
The liquid drop ejection head is temporarily mounted to hang on the carriage through the head holding member in a state where the nozzle forming surface is upward.
The moving means includes an X Y Y θ axis moving table,
And a set member fixed to the θ-axis movement table of the X, Y-θ-axis movement table, and holding the carriage in the upward direction of the liquid drop ejection head.
[6" claim-type="Currently amended] The method according to claim 1 or 2,
The head retaining member is provided with two engaging holes which are spaced apart from each other while the correction means are engaged.
The correction means includes an X, Y, θ axis movement table,
A Z-axis movement table attached to the θ-axis movement table of the X, Y, and θ axis movement tables,
And a pair of engaging arms attached to the Z-axis moving table and engaging the two engaging holes of the head holding member.
[7" claim-type="Currently amended] The method according to claim 1 or 2,
The fixing means includes an adhesive applying mechanism for applying an adhesive between the head holding member and the carriage;
And a moving table for moving the adhesive agent applying mechanism in the X, Y, and Z axis directions.
[8" claim-type="Currently amended] An assembly apparatus of a head unit that faces a head unit temporarily equipped with a plurality of liquid drop ejection heads in a single carriage, and fixes the liquid drop ejection heads in a state in which the liquid drop ejection heads are positioned in the carriage.
Recognition means for image recognition of the position of the carriage and the position of each liquid drop ejecting head, respectively;
Moving means for holding the carriage and moving it in the X, Y, and θ directions;
Correction means coupled to the liquid drop ejection head, for finely moving the liquid drop ejection head in the X, Y, and θ directions;
Fixing means for fixing the liquid drop ejection head to the carriage;
And control means for controlling said recognition means, said moving means, said correcting means and said fixing means,
The control means drives the moving means based on the recognition result of the recognizing means to position the carriage, and then drives the correcting means to position the respective liquid drop ejection heads relative to the carriage, and the fixed And a means for fixing each of the positioned liquid drop ejection heads to the carriage.
[9" claim-type="Currently amended] A head which faces a plurality of liquid drop ejection heads each held by a head holding member to a head unit temporarily mounted in a single carriage via the head holding member, and fixes each of the liquid drop ejecting heads in a state positioned on the carriage; As a method of assembling the unit,
A carriage recognition step of image recognition of the position of the carriage;
A carriage positioning step of positioning the carriage based on a recognition result in the carriage recognition step;
A head recognition step of performing image recognition on the positions of the respective liquid drop ejection heads;
A head positioning step of positioning each of the liquid drop ejecting heads with respect to the carriage through the head holding members based on a recognition result in the head recognition step;
And a fixing step of fixing each of the positioned head holding members to the carriage.
[10" claim-type="Currently amended] The method of claim 9,
And the head recognizing step, the head positioning step, and the fixing step are repeated in this process order by the number of the liquid drop discharge heads.
[11" claim-type="Currently amended] The method according to claim 9 or 10,
The fixing step is performed by adhering the head holding member to the carriage with an adhesive;
And a main fixing step of mechanically fixing the head holding member to the carriage after the fixing step.
[12" claim-type="Currently amended] The method according to claim 9 or 10,
The alignment mask which pattern-formed the position of the said carriage and the position of each said liquid droplet discharge head mounted in the said carriage is prepared,
And the carriage positioning process and the head positioning process are executed based on master position data and unit position data respectively obtained from the alignment mask and the head unit under the same conditions.
[13" claim-type="Currently amended] An assembly method of a head unit that faces a head unit temporarily equipped with a plurality of liquid drop ejection heads in a single carriage, and fixes the liquid drop ejection heads in a state in which the liquid drop ejection heads are positioned in the carriage.
A carriage recognition step of image recognition of the position of the carriage;
A carriage positioning step of positioning the carriage based on a recognition result in the carriage recognition step;
A head recognition step of performing image recognition on the positions of the respective liquid drop ejection heads;
A head positioning step of positioning the respective liquid drop ejection heads relative to the carriage based on a recognition result in the head recognition step;
And a fixing step of fixing the positioned liquid droplet ejection heads to the carriage.
[14" claim-type="Currently amended] Of the liquid drop ejection head for positioning the liquid drop ejection head temporarily mounted on the carriage via the head retaining member to the carriage, before the liquid drop ejection head held by the head retaining member is fixed to the carriage on which it is mounted. As a positioning device,
Recognition means for image recognition of the position of the liquid drop discharge head;
Correction means for engaging the head holding member and relatively moving the head holding member relatively in the X, Y, and θ directions;
Control means for controlling said recognition means and said correction means,
The control means drives the correction means based on the recognition result of the recognition means to position the liquid drop ejection head with respect to the carriage via the head holding member. Device.
[15" claim-type="Currently amended] The method of claim 14,
An alignment mask having a pattern formed on the position of the liquid drop ejecting head relative to the carriage,
And the control means controls the correction means based on the master position data obtained from the alignment mask and the head position data obtained from the liquid drop ejection head via the recognition means. .
[16" claim-type="Currently amended] The method according to claim 14 or 15,
Recognition of the position of the liquid drop ejection head is performed by the recognition means respectively recognizing two separated nozzles in the nozzle row formed on the nozzle formation surface of the liquid drop ejection head,
The recognizing means has two recognizing cameras for accommodating each of the two nozzles simultaneously in the field of view.
[17" claim-type="Currently amended] The method of claim 16,
And the recognition means has an inter-view adjustment mechanism capable of adjusting the inter-view dimensions of each other in the two recognition cameras.
[18" claim-type="Currently amended] The method according to claim 14 or 15,
The head retaining member is provided with two engaging holes which are spaced apart from each other while the correction means are engaged.
The correction means includes an X, Y, θ axis movement table,
A Z-axis movement table attached to the θ-axis movement table of the X, Y, and θ axis movement tables,
And a pair of engaging arms attached to the Z-axis moving table and engaging the two engaging holes of the head holding member.
[19" claim-type="Currently amended] The method of claim 18,
The X-axis movement table and the Y-axis movement table of the X-Y-θ-axis movement table each have a linear motor constituting a drive source and an air slider for guiding movement. Device.
[20" claim-type="Currently amended] The method of claim 18,
Each of the engaging arms has a coupling pin whose tip is inserted into each of the coupling holes,
The distal end portion of the coupling pin is formed in a tapered shape in which the distal end side is made smaller in diameter than the engaging hole and the proximal end is made larger in diameter than the engaging hole.
[21" claim-type="Currently amended] The method of claim 20,
Each of the coupling arms may include a pin holder configured to hold the coupling pin in an axial direction thereof;
And a spring for urging the coupling pin in the protruding direction.
[22" claim-type="Currently amended] The method of claim 18,
The two engaging holes of the said head holding member are formed in one circular shape, and the other is formed elliptical shape, The positioning apparatus of the liquid drop discharge head characterized by the above-mentioned.
[23" claim-type="Currently amended] A liquid drop ejection head positioning device for positioning a liquid drop ejection head temporarily mounted in the carriage onto the carriage prior to fixing the liquid drop ejection head to a carriage on which it is mounted.
Recognition means for image recognition of the position of the liquid drop discharge head;
Correction means coupled to the liquid drop discharge head and relatively small movement of the liquid drop discharge head in the X, Y and θ axis directions;
Control means for controlling said recognition means and said correction means,
And the control means drives the correction means to position the liquid drop ejection head relative to the carriage based on the recognition result of the recognition means.
[24" claim-type="Currently amended] A device for assembling a head unit, comprising a positioning device for a liquid drop ejecting head according to claim 14, 15 or 23.
[25" claim-type="Currently amended] Of the liquid drop ejection head for positioning the liquid drop ejection head temporarily mounted on the carriage via the head retaining member to the carriage, prior to fixing the liquid drop ejection head mounted on the head retaining member to the carriage on which it is mounted. As a positioning method,
A head recognition process of image recognition of the position of the liquid drop ejection head;
And a head positioning step of positioning the liquid drop ejection head with respect to the carriage via the head holding member based on the recognition result in the head recognition step.
[26" claim-type="Currently amended] The method of claim 25,
The alignment mask which pattern-formed the position of the said liquid drop ejection head mounted in the said carriage is prepared,
And the head positioning step is executed based on the master position data and the head position data obtained from the alignment mask and the liquid drop ejecting head, respectively, under the same conditions.
[27" claim-type="Currently amended] A positioning method of a liquid drop ejection head for positioning the liquid drop ejection head temporarily mounted on the carriage onto the carriage, prior to fixing the liquid drop ejection head to the carriage on which it is mounted.
A head recognition process of image recognition of the position of the liquid drop ejection head;
And a head positioning step of positioning the liquid drop ejection head relative to the carriage based on the recognition result in the head recognition step.
[28" claim-type="Currently amended] A liquid drop ejection head fixing device for fixing a liquid drop ejection head mounted on a head holding member in a positioning state to a carriage on which it is mounted,
Carriage holding means for holding the carriage,
Head holding means for holding the liquid drop ejecting head in a positioning state with respect to the carriage through the head holding member;
And an adhesive injection means for injecting an adhesive between the head holding member and the carriage in this state.
[29" claim-type="Currently amended] The method of claim 28,
And the head holding means has a positioning means for positioning the liquid drop ejecting head on the carriage via the head holding member.
[30" claim-type="Currently amended] The method of claim 28 or 29,
The head holding means has a timer, and the head holding means maintains the liquid drop ejecting head in a positioning state at a time when the adhesive reaches a predetermined adhesive strength after the injection of the adhesive. Fixing device of the liquid drop discharge head.
[31" claim-type="Currently amended] The method of claim 28 or 29,
The adhesive injection means, the adhesive injection mechanism for injecting the adhesive between the head holding member and the carriage;
And a moving table for moving the adhesive injection mechanism in the X, Y, and Z axis directions.
[32" claim-type="Currently amended] The method of claim 31, wherein
An X-axis movement table, a Y-axis movement table, and a Z-axis movement table of the movement table, respectively, wherein the driving source is composed of an air cylinder.
[33" claim-type="Currently amended] The method of claim 31, wherein
A pair of adhesive injection holes are formed in the contact portion with the carriage of the head holding member by sandwiching the nozzle forming surface of the liquid drop ejecting head through the contact portion.
The adhesive injection mechanism has a pair of adhesive injection nozzles corresponding to the pair of adhesive injection holes.
[34" claim-type="Currently amended] The method of claim 33, wherein
The pair of adhesive injection holes of the head holding member are formed in two sets with a slight separation in the X-axis direction or the Y-axis direction,
In response to this, the X-axis movement table or the Y-axis movement table of the movement table has a sub table for reciprocating the adhesive injection mechanism by the separation dimension.
[35" claim-type="Currently amended] The method of claim 33, wherein
An end portion of the carriage side of each of the adhesive injection holes is beveled.
[36" claim-type="Currently amended] The method of claim 33, wherein
Each adhesive injection nozzle is inclined with respect to the Z axis,
And each of the adhesive injection holes is formed as a hole elongated in the inclined direction.
[37" claim-type="Currently amended] A fixing device for a liquid drop ejection head for fixing a liquid drop ejection head in a positioning state to a carriage on which it is mounted,
Carriage holding means for holding the carriage,
Head holding means for maintaining the liquid drop ejection head in a positioning state with respect to the carriage;
And an adhesive injecting means for injecting an adhesive between the liquid droplet ejecting head and the carriage in this state.
[38" claim-type="Currently amended] 38. An assembly apparatus for a head unit, comprising the fixing device for the liquid drop ejection head according to claim 28, 29, or 37.
[39" claim-type="Currently amended] A method of fixing a liquid drop ejection head for fixing a liquid drop ejection head mounted on a head holding member in a positioning state to a carriage on which it is mounted,
A head holding step of holding the liquid drop ejecting head in a positioning state with respect to the carriage through the head holding member;
And an adhesive injection step of injecting an adhesive between the head holding member and the carriage in this state.
[40" claim-type="Currently amended] As a fixing method of a liquid drop discharge head for fixing a liquid drop discharge head in a positioning state to a carriage on which it is mounted,
A head holding step of holding the liquid drop ejecting head in a positioning state with respect to the carriage;
And a glue injection step of injecting an adhesive between the liquid drop discharge head and the carriage in this state.
[41" claim-type="Currently amended] As a manufacturing method of the liquid crystal display device which forms many filter elements on the board | substrate of a color filter using the head unit assembled by the head unit assembly apparatus of Claim 1, 2 or 8.
A variety of filter materials are introduced into the plurality of liquid drop discharge heads,
And a plurality of the liquid crystal discharge heads are scanned relatively to the substrate through the head unit, and selectively discharge the filter material to form a plurality of the filter elements.
[42" claim-type="Currently amended] A manufacturing method of an organic EL device in which an EL light emitting layer is formed on each of a plurality of pixel pixels on a substrate using a head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8.
Various light emitting materials are introduced into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the light emitting material is selectively discharged to form a plurality of the EL light emitting layers.
[43" claim-type="Currently amended] A manufacturing method of an electron emitting device in which a plurality of phosphors are formed on an electrode by using the head unit assembled by the assembly unit of the head unit according to claim 1, 2 or 8.
Various fluorescent materials are introduced into the plurality of liquid drop discharge heads,
The plurality of liquid drop ejection heads are scanned relatively to the electrode through the head unit, and the fluorescent material is selectively discharged to form a plurality of the phosphors.
[44" claim-type="Currently amended] A manufacturing method of a PDP apparatus in which phosphors are formed in a plurality of concave portions on a rear substrate by using the head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8, respectively.
Various fluorescent materials are introduced into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relatively to the back substrate through the head unit, and the fluorescent material is selectively discharged to form a plurality of the phosphors.
[45" claim-type="Currently amended] A manufacturing method of an electrophoretic display device, wherein a moving body is formed in a plurality of concave portions on an electrode by using the head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8.
Introduces a variety of electrophoretic material into the plurality of liquid drop discharge head,
The plurality of liquid drop ejection heads are scanned relatively to the electrode through the head unit, and a plurality of the moving bodies are formed by selectively discharging the moving body material to form a plurality of the electrophoretic display devices. .
[46" claim-type="Currently amended] As a manufacturing method of a color filter which manufactures the color filter which used the head unit assembled by the head unit assembling apparatus of Claim 1, 2 or 8, and arrange | positioned many filter elements on a board | substrate,
A variety of filter materials are introduced into the plurality of liquid drop discharge heads,
And a plurality of the liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the filter material is selectively ejected to form a plurality of the filter elements.
[47" claim-type="Currently amended] The method of claim 46,
The said plurality of filter elements are accommodated in the recessed part formed by the convex bank provided on the board | substrate,
Before forming the filter element,
A bank material is introduced into the plurality of liquid drop discharge heads,
And a plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the bank material is selectively ejected to form the banks.
[48" claim-type="Currently amended] The method of claim 47,
An overcoat film covering the plurality of filter elements and the banks is formed,
After forming the filter element,
Introducing a translucent coating material into the plurality of liquid drop ejecting heads,
And a plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the coating material is selectively ejected to form the overcoat film.
[49" claim-type="Currently amended] A method for producing an organic EL, wherein a plurality of pixel pixels including an EL light emitting layer are arranged on a substrate using a head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8.
Various light emitting materials are introduced into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the plurality of the EL light emitting layers are formed by selectively discharging the light emitting material.
[50" claim-type="Currently amended] The method of claim 49,
The plurality of EL light-emitting layers are housed in recesses formed by convex banks provided on the substrate,
Before forming the EL light emitting layer,
A bank material is introduced into the plurality of liquid drop discharge heads,
And the banks are formed by relatively scanning the plurality of liquid drop ejection heads with respect to the substrate through the head unit, and selectively ejecting the bank material to form the banks.
[51" claim-type="Currently amended] 51. The method of claim 50 wherein
A plurality of pixel electrodes are formed between the plurality of EL light emitting layers and the substrate to correspond to the EL light emitting layers.
Before forming the bank,
Introducing a liquid electrode material into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the liquid electrode material is selectively ejected to form a plurality of the pixel electrodes.
[52" claim-type="Currently amended] The method of claim 51, wherein
Opposite electrodes are formed to cover the plurality of EL light emitting layers and the banks,
After the EL light emitting layer is formed,
Introducing a liquid electrode material into the plurality of liquid drop discharge heads,
And a plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the liquid electrode material is selectively ejected to form the counter electrode.
[53" claim-type="Currently amended] The spacer which uses the head unit assembled by the head unit assembling apparatus of Claim 1, 2 or 8, and forms the spacer of a number of particle shape so that a micro cell gap may be formed between two board | substrates. As the formation method,
A particle material constituting a spacer is introduced into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relative to the substrate through the head unit, and the particulate material is selectively ejected to form the spacer on at least one of the substrates.
[54" claim-type="Currently amended] As a metal wiring formation method which forms a metal wiring on a board | substrate using the head unit assembled by the assembly apparatus of the head unit of Claim 1, 2 or 8,
Introducing a liquid metal material into the plurality of liquid drop discharge heads,
And forming the metal wiring by scanning the plurality of liquid drop ejection heads relative to the substrate through the head unit, and selectively discharging the liquid metal material.
[55" claim-type="Currently amended] A lens forming method in which a plurality of micro lenses are formed on a substrate using a head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8.
Lens material is introduced into the plurality of liquid drop ejection heads,
And a plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the lens material is selectively ejected to form a plurality of the micro lenses.
[56" claim-type="Currently amended] As a resist formation method which forms the resist of arbitrary shape on a board | substrate using the head unit assembled by the head unit assembling apparatus of Claim 1, 2 or 8.
A resist material is introduced into the plurality of liquid drop ejection heads,
And scanning the plurality of liquid drop ejection heads relative to the substrate through the head unit, and selectively ejecting the resist material to form the resist.
[57" claim-type="Currently amended] A light diffuser forming method for forming a plurality of light diffusers on a substrate using a head unit assembled by the head unit assembling apparatus according to claim 1, 2 or 8.
A light diffusing material is introduced into the plurality of liquid drop discharge heads,
And the plurality of liquid drop ejection heads are scanned relatively to the substrate through the head unit, and the light diffusing material is selectively discharged to form a plurality of the light diffusers.

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同族专利:

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公开号 | 公开日

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KR100453607B1|2004-10-20|

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JP2003127392A|2003-05-08|

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JP3893937B2|2007-03-14|

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KR100453587B1|2004-10-20|

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TWI252812B|2006-04-11|

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CN1411985A|2003-04-23|

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CN1274496C|2006-09-13|

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KR20040071110A|2004-08-11|

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US7322394B2|2008-01-29|

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US20030085943A1|2003-05-08|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-10-19|Priority to JP2001322829A

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2001-10-19|Priority to JPJP-P-2001-00322829

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2002-10-11|Application filed by 세이코 엡슨 가부시키가이샤

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2003-04-26|Publication of KR20030032849A

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2004-10-20|Application granted

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2004-10-20|Publication of KR100453607B1

优先权:

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申请号 | 申请日 | 专利标题

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JP2001322829A|JP3893937B2|2001-10-19|2001-10-19|Head unit assembling apparatus and assembling method, and droplet discharge head positioning apparatus and positioning method|

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JPJP-P-2001-00322829|2001-10-19|